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0032138896
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Micromachined inertial sensors
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Proc. IEEE
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Yazdi, N.1
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0031069462
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A 3 axis surface micromachined ΣΔ accelerometer
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3
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A 2.5 V 14-bit Sigma-Delta CMOS-SOI capacitive accelerometer
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Dec
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B. V. Amini and F. Ayazi, "A 2.5 V 14-bit Sigma-Delta CMOS-SOI capacitive accelerometer," IEEE J. Solid-State Circuits, vol. 39, pp. 2467-2476, Dec. 2004.
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Amini, B.V.1
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4
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33750118637
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High performance matched-mode tuning fork gyroscope
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Jan
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M. F. Zaman, A. Sharma, and F. Ayazi, "High performance matched-mode tuning fork gyroscope," in Proc. IEEE MEMS 2006, Jan. 2006, pp. 66-69.
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Proc. IEEE MEMS 2006
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Zaman, M.F.1
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A. Sharma, M. F. Zaman, and F. Ayazi, "A 0.2°/hr micro-gyroscope with automatic CMOS mode matching," in IEEE Int. Solid-State Circuits Conf. Dig. Tech. Papers, 2007, pp. 386-387.
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Sharma, A.1
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A HARPSS polysilicon vibrating ring gyroscope
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Jun
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F. Ayazi and K. Najafi, "A HARPSS polysilicon vibrating ring gyroscope," IEEE J. Microelectromechan. Syst., vol. 10, pp. 169-179, Jun. 2001.
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10
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Aug
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S. Pourkamali, A. Hashimura, R. Abdolvand, G. Ho, A. Erbil, and F. Ayazi, "High-Q single crystal silicon HARPSS capacitive beam resonators with sub-micron transduction gaps," IEEE J. Microelectromechan. Syst., vol. 12, no. 4, pp. 487-496, Aug. 2003.
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A monolithic surface micromachined Z axis gyroscope with digital output
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Jun
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X. Jiang, J. I. Seeger, M. Kraft, and B. E. Boser, "A monolithic surface micromachined Z axis gyroscope with digital output," in Symp. VLSI Circuits Dig. Tech. Papers, Jun. 2000.
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A fourth-order ΣΔ interface for micromachined inertial sensors
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A low-noise low-offset capacitive sensing amplifier for a 50-μg √Hz monolithic CMOS MEMS accelerometer
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A 2-chip, 4-MHz micro-electro-mechanical reference oscillator
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K. Sundaresan, G. K. Ho, S. Pourkamali, and F. Ayazi, "A 2-chip, 4-MHz micro-electro-mechanical reference oscillator," in Proc. ISCAS, 2005, pp. 5461-5464.
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Proc. ISCAS
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Mechanical-thermal noise in micromachined acoustic and vibration sensors
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New surface micromachined angular rate sensor for vehicle stabilizing systems in automotive application
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A 104 dB SNDR transimpedance-based CMOS ASIC for tuning fork microgyroscope
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