메뉴 건너뛰기




Volumn 28, Issue 2, 2011, Pages 263-271

Fitting-determined formulation of effective medium approximation for 3D trench structures in model-based infrared reflectrometry

Author keywords

[No Author keywords available]

Indexed keywords

FINITE DIFFERENCE METHOD;

EID: 79751495215     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.28.000263     Document Type: Article
Times cited : (11)

References (31)
  • 1
    • 33749671530 scopus 로고    scopus 로고
    • Model-based infrared metrology for advanced technology nodes and 300 mm wafer processing
    • DOI 10.1063/1.2063029, CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2005 - International Conference
    • P. A. Rosenthal, C. A. Durán, J. Tower, and A. Mazurenko, "Model-based infrared metrology for advanced technology nodes and 300 mm wafer processing," AIP Conf. Proc. 788, 620-624 (2005). (Pubitemid 44555926)
    • (2005) AIP Conference Proceedings , vol.788 , pp. 620-624
    • Rosenthal, P.A.1    Duran, C.2    Tower, J.3    Mazurenko, A.4    Mantz, U.5    Weidner, P.6    Kasic, A.7
  • 2
    • 35348877314 scopus 로고    scopus 로고
    • Measuring trench structures for microelectronics with model-based infrared reflectometry
    • A. A. Maznev, A. Mazurenko, C. A. Durán, and M. Gostein, "Measuring trench structures for microelectronics with model-based infrared reflectometry," AIP Conf. Proc. 931,74-78 (2007).
    • (2007) AIP Conf. Proc. , vol.931 , pp. 74-78
    • Maznev, A.A.1    Mazurenko, A.2    Durán, C.A.3    Gostein, M.4
  • 11
    • 0000218898 scopus 로고
    • Electromagnetic properties of a finely stratified medium
    • S. M. Rytov, "Electromagnetic properties of a finely stratified medium," Sov. Phys. JETP 2, 466-475 (1956).
    • (1956) Sov. Phys. JETP , vol.2 , pp. 466-475
    • Rytov, S.M.1
  • 12
    • 0040837583 scopus 로고
    • Ability and limitation of effective medium theory for subwavelength gratings
    • H. Kikuta, H. Yoshida, and K. Iwata, "Ability and limitation of effective medium theory for subwavelength gratings," Opt. Rev. 2, 92-99 (1995).
    • (1995) Opt. Rev. , vol.2 , pp. 92-99
    • Kikuta, H.1    Yoshida, H.2    Iwata, K.3
  • 15
    • 69949135990 scopus 로고
    • Antireflection structured surfaces for the infrared spectral region
    • D. H. Raguin and G. M. Morris, "Antireflection structured surfaces for the infrared spectral region," Appl. Opt. 32, 1154-1167 (1993).
    • (1993) Appl. Opt. , vol.32 , pp. 1154-1167
    • Raguin, D.H.1    Morris, G.M.2
  • 16
    • 0000392505 scopus 로고    scopus 로고
    • Achromatic quarter-wave plates using the dispersion of form birefringence
    • H. Kikuta, Y. Ohira, and K. Iwata, "Achromatic quarter-wave plates using the dispersion of form birefringence," Appl. Opt. 36, 1566-1572 (1997). (Pubitemid 127638575)
    • (1997) Applied Optics , vol.36 , Issue.7 , pp. 1566-1572
    • Kikuta, H.1    Ohira, Y.2    Iwata, K.3
  • 17
    • 0001037185 scopus 로고    scopus 로고
    • Fabrication of multilevel phase computer-generated hologram elements based on effective medium theory
    • W. Yu, K. Takahara, T. Konishi, T. Yotsuya, and Y. Ichioka, "Fabrication of multilevel phase computer-generated hologram elements based on effective medium theory," Appl. Opt. 39, 3531-3536 (2000).
    • (2000) Appl. Opt. , vol.39 , pp. 3531-3536
    • Yu, W.1    Takahara, K.2    Konishi, T.3    Yotsuya, T.4    Ichioka, Y.5
  • 18
    • 77649196401 scopus 로고    scopus 로고
    • Design of binary subwavelength multiphase level computer generated holograms
    • W. Freese, T. Kämpfe, E. B. Kley, and A. Tunnermann, "Design of binary subwavelength multiphase level computer generated holograms," Opt. Lett. 35, 676-678 (2010).
    • (2010) Opt. Lett. , vol.35 , pp. 676-678
    • Freese, W.1    Kämpfe, T.2    Kley, E.B.3    Tunnermann, A.4
  • 19
    • 4344599788 scopus 로고    scopus 로고
    • Effective-medium model for fast evaluation of scatterometric measurements on gratings
    • A. Weidner, M. Slodowski, C. Halm, C. Schneider, and L. Pfitzner, "Effective-medium model for fast evaluation of scatterometric measurements on gratings," Proc. SPIE 5375, 232-243 (2004).
    • (2004) Proc. SPIE , vol.5375 , pp. 232-243
    • Weidner, A.1    Slodowski, M.2    Halm, C.3    Schneider, C.4    Pfitzner, L.5
  • 20
    • 34250760387 scopus 로고    scopus 로고
    • Simplified optical scatterometry for periodic nanoarrays in the near-quasi-static limit
    • DOI 10.1364/AO.46.002219
    • I. Abdulhalim, "Simplified optical scatterometry for periodic na-noarrays in the near-quasi-static limit," Appl. Opt. 46, 2219-2228 (2007). (Pubitemid 46964324)
    • (2007) Applied Optics , vol.46 , Issue.12 , pp. 2219-2228
    • Abdulhalim, I.1
  • 21
    • 77955996741 scopus 로고    scopus 로고
    • Effective medium approximations for modeling optical reflectance from gratings with rough edges
    • B. C. Bergner, T. A. Germer, and T. J. Suleski, "Effective medium approximations for modeling optical reflectance from gratings with rough edges," J. Opt. Soc. Am. A 27, 1083-1090 (2010).
    • (2010) J. Opt. Soc. Am. A , vol.27 , pp. 1083-1090
    • Bergner, B.C.1    Germer, T.A.2    Suleski, T.J.3
  • 22
    • 70449711345 scopus 로고    scopus 로고
    • Improved model-based infrared reflectrometry for measuring deep trench structures
    • C. W. Zhang, S. Y. Liu, T. L. Shi, and Z. R. Tang, "Improved model-based infrared reflectrometry for measuring deep trench structures," J. Opt. Soc. Am. A 26, 2327-2335 (2009).
    • (2009) J. Opt. Soc. Am. A , vol.26 , pp. 2327-2335
    • Zhang, C.W.1    Liu, S.Y.2    Shi, T.L.3    Tang, Z.R.4
  • 23
    • 4043180844 scopus 로고
    • Transport coefficients of composite materials
    • J. L. Jackson and S. R. Coriell, "Transport coefficients of composite materials," J. Appl. Phys. 39, 2349-2354 (1968).
    • (1968) J. Appl. Phys. , vol.39 , pp. 2349-2354
    • Jackson, J.L.1    Coriell, S.R.2
  • 24
    • 84975604806 scopus 로고
    • Antire-flection surfaces in silicon using binary optics technology
    • M. E. Motamedi, W. H. Southwell, and W. J. Gunning, "Antire-flection surfaces in silicon using binary optics technology," Appl. Opt. 31, 4371-1376 (1992).
    • (1992) Appl. Opt. , vol.31 , pp. 4371-1376
    • Motamedi, M.E.1    Southwell, W.H.2    Gunning, W.J.3
  • 25
    • 0028531768 scopus 로고
    • Artificial uniaxial and biaxial dielectrics with use of two-dimensional subwave-length binary gratings
    • E. B. Grann, M. G. Moharam, and D. A. Pommet, "Artificial uniaxial and biaxial dielectrics with use of two-dimensional subwave-length binary gratings," J. Opt. Soc. Am. A 11, 2695-2703 (1994).
    • (1994) J. Opt. Soc. Am. A , vol.11 , pp. 2695-2703
    • Grann, E.B.1    Moharam, M.G.2    Pommet, D.A.3
  • 26
    • 0030261714 scopus 로고    scopus 로고
    • On the effective medium theory of subwavelength periodic structures
    • P. Lalanne and D. L. Lalanne, "On the effective medium theory of subwavelength periodic structure," J. Mod. Opt. 43, 2063-2085 (1996). (Pubitemid 126595200)
    • (1996) Journal of Modern Optics , vol.43 , Issue.10 , pp. 2063-2085
    • Lalanne, P.1    Lemercier-Lalanne, D.2
  • 27
    • 4344703245 scopus 로고    scopus 로고
    • Infrared spectroscopic ellipsometry in semiconductor manufacturing
    • P. Y. Guittet, U. Mantz, and P. Weidner, "Infrared spectroscopic ellipsometry in semiconductor manufacturing," Proc. SPIE 5375, 771-778 (2004).
    • (2004) Proc. SPIE , vol.5375 , pp. 771-778
    • Guittet, P.Y.1    Mantz, U.2    Weidner, P.3
  • 28
    • 31344476759 scopus 로고    scopus 로고
    • Fitting-based determination of an effective medium of a metallic periodic structure and application to photonic crystals
    • DOI 10.1364/JOSAA.23.000199
    • S. Moon and D. Kim, "Fitting-based determination of an effective medium of a metallic periodic structure and application to photonic crystals," J. Opt. Soc. Am. A 23, 199-207 (2006). (Pubitemid 43137587)
    • (2006) Journal of the Optical Society of America A: Optics and Image Science, and Vision , vol.23 , Issue.1 , pp. 199-207
    • Moon, S.1    Kim, D.2
  • 29
    • 33745602198 scopus 로고    scopus 로고
    • Investigation of an effective medium theory for metallic periodic structure
    • S. Moon and D. Kim, "Investigation of an effective medium theory for metallic periodic structure," Proc. SPIE 6128, 61281M (2006).
    • (2006) Proc. SPIE , vol.6128
    • Moon, S.1    Kim, D.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.