Effective-medium model for fast evaluation of scatterometric measurements on gratings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5375, Issue PART 1, 2004, Pages 232-243

  Weidner, A ^a   Slodowski, M ^b   Halm, C ^b   Schneider, C ^a   Pfitzner, L ^a  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

^b VISTEC SEMICONDUCTOR SYSTEMS GMBH   (Germany)

Author keywords

Effective medium model; Linewidth measurement; Scatterometry; Zero order grating

Indexed keywords

EFFECTIVE-MEDIUM MODEL; LINEWIDTH MEASUREMENTS; SCATTEROMETRY; ZERO-ORDER GRATING;

ALGEBRA; COMPUTER SIMULATION; CRYSTALS; ELLIPSOMETRY; FOURIER TRANSFORMS; OPTICAL PROPERTIES; OPTIMIZATION; PARAMETER ESTIMATION; PERMITTIVITY; REFLECTOMETERS; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SCATTERING; THROUGHPUT;

DIFFRACTION GRATINGS;

EID: 4344599788     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.535147     Document Type: Conference Paper

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