Measuring trench structures for microelectronics with model-based infrared reflectometry

AIP Conference Proceedings

Volumn 931, Issue , 2007, Pages 74-78

  Maznev, A A ^a   Mazurenko, A ^a   Duran C ^a   Gostein, M ^a  

^a PHILIPS RESEARCH LABORATORIES   (Germany)

Author keywords

High aspect ratio trenches; Infrared reflectometry; Optical metrology

Indexed keywords

EID: 35348877314     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2799440     Document Type: Conference Paper

References (9)

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9. C.A. Durán, A.A. Maznev, G.T. Merklin, A. Mazurenko and M. Gostein, "Infrared Reflectometry for Metrology of Trenches in Power Devices", to be presented at 2007 ASMC conference.