Simplified optical scatterometry for periodic nanoarrays in the near-quasi-static limit

Applied Optics

Volumn 46, Issue 12, 2007, Pages 2219-2228

  Abdulhalim, I ^a  

^a BEN GURION UNIVERSITY OF THE NEGEV   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; EIGENVALUES AND EIGENFUNCTIONS; LIGHT POLARIZATION; OPTICAL DEVICES; OPTICAL VARIABLES MEASUREMENT; PERIODIC STRUCTURES;

LAMELLAR NANOSCALE GRATING; OPTICAL SCATTEROMETRY; PERIODIC NANOARRAYS;

NANOSTRUCTURED MATERIALS;

EID: 34250760387     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.002219     Document Type: Article

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