Tunable compound eye cameras

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7716, Issue , 2010, Pages

  Pätz, Daniel ^a   Leopold, Steffen ^a   Knöbber, Fabian ^b   Sinzinger, Stefan ^a   Hoffmann, Martin ^a   Ambacher, Oliver ^b  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b FRAUNHOFER INSTITUTE FOR APPLIED SOLID STATE PHYSICS IAF   (Germany)

Author keywords

Aluminum nitride; Compound eye camera; Diamond; Microlens array; Tunable

Indexed keywords

ALN; BEAM DEFLECTION; COMPOUND EYE CAMERA; LARGE DEFORMATIONS; LONG TERM STABILITY; MATERIAL SYSTEMS; MICRO-OPTICAL COMPONENTS; MICROLENS ARRAY; MICROPRISMS; NANOCRYSTALLINE DIAMONDS; OPTICAL FUNCTIONALITIES; PIEZOELECTRIC ELEMENTS; SCANNING OF THE OBJECTS; SPHERICAL ELEMENTS; SURFACE QUALITIES; TUNABLE; TUNABLE FOCUS; VIEWING ANGLE;

ALUMINUM; CAMERAS; DEFORMATION; DIAMONDS; MECHANICAL STABILITY; MICROLENSES; NITRIDES; OPTICAL INSTRUMENT LENSES; SCANNING;

ALUMINUM NITRIDE;

EID: 79551694814     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.854532     Document Type: Conference Paper

References (24)

1. Hamdorf, K., [Physiologie der Insekten], Gustav Fischer Verlag, Stuttgart (1995).
2. Duparré, J., Dannberg, P., Schreiber, P., Bräuer, A. and Tünnermann, A, "Thin compound-eye camera," Appl. Opt. 44, 2949-2956 (2005).
3. Duparré, J., Wippermann, F., Dannberg, P. and Bräuer, A., "Artificial compound eye zoom camera", Bioinspir. Biomim. 3 046008 (2008).
4. Watson, E. A., "Analysis of beam steering with decentered microlens arrays", Opt. Eng., Vol. 32, 2665 (1993).
5. Tonisch, K., Cimalla, V., Foerster, C., Romanus, H., Ambacher, O., Dontsov, D., "Piezoelectric properties of polycrystalline AlN thin films for MEMS application" Sens. Actuators, A, 132, 658 (2006).
6. Oliveira, I., Massi, M., Santos, S., Otani, C., Maciel, H. and Mansano, R., "Dielectric characteristics of AlN films grown by d.c.-magnetron sputtering discharge" Diamond Relat. Mater. 10, 1317 (2001).
7. Chiu, W., Wu, C., Kao, H., Jeng, E., Shin Chen, J. and Jaing, C., "The optical properties and applications of AIN thin films prepared by a helicon sputtering system" J. Vac. Sci. Technol. A 20, 843 (2002).
8. Conrad, H., Schmidt, J., Pufe, W., Zimmer, F., Sander, T., Schenk, H. and Lakner, H., "Aluminium nitride - a promising and full CMOS compatible piezoelectric material for MOEMS applications" Proc. SPIE Int. Soc. Opt. Eng. 7362, 73620J (10) (2009).
9. Polster, T., Albrecht, A. and Hoffmann, M., "Thin free standing AlN membranes - mechanical stable and flexible structural material for MEMS devices" 19th MME Workshop, Aachen, (2008).
10. Chen, C., Yeh, P., Hu, C. and Fang, W., "Design and characterization of single-layer step-bridge structure for out-of-plane thermal actuator" J. Microelectro-mech. Syst. 17, 70 (2008).
11. Luo, J. K., Fu, Y. Q., Le, H. R., Williams, J. A., Spearing, S. M. and Milne, W. I., "Diamond and diamond-like carbon MEMS" J. Micromech. Microeng. 17 (2007) S147.
12. Kohn, E., Gluche, P. and Adamschik, M., "Diamond MEMS - a new emerging technology" Diamond Relat. Mater. 8 (1999) 934.
13. Harkonen, A., Suomalainen, S., Saarinen, E., Orsila, L., Koskinen, R., Okhotnikov, O., Calvez, S. and Dawson, M., "4W single-transverse mode VECSEL utilising intra-cavity diamond heat spreader" Electron. Lett. 42, 12 (2006) 693.
14. Hu, Z. G., Prunici, P., Hess, P. and Chen, K. H., "Optical properties of nanocrystalline diamond films from midinfrared to ultraviolet using reflectometry and ellipsometry" J. Mater. Sci.: Mater. Electron 18 (2007) S37.
15. Zhao, Y., Zhang, B., Yao, N., Sun, G. and Li, J., "Improved field emission properties from metal-coated diamond films" Diamond Relat. Mater. 16 (2007) 650.
16. Benetti, M., Cannata, D., Di Pietrantonio, F., Fedosov, V. I. and Verona, E., "Gigahertz-range electro-acoustic devices based on pseudo-surface-acoustic waves in AlN/diamond/Si structures" Appl. Phys. Lett. 87 (2005) 033504.
17. Assouar, M. B., Elmazria, O., Kirsch, P., Alnot, P., Mortet, V. and Tiusan, C., "High-frequency surface acoustic wave devices based on AlN/diamond layered structure realized using e-beam lithography" J. Appl. Phys. 101 (2007) 114507.
18. Benedic, F., Assouar, M. B., Kirsch, P. Moneger, D., Brinza, O., Elmazria, O., Alnot, P., Gicquel A., "Very high frequency SAW devices based on nanocrystalline diamond and aluminum nitride layered structure achieved using e-beam lithography" Diamond Relat. Mater. 17 (2008) 804.
19. Miskys, C. R., Garrido, J. A., Hermann, M., Eickhoff, M., Nebel, C. E., Stutzmann, M. and Vogg, G., Appl. Phys. Lett. 85, 17 (2004) 3699.
20. Williams, O. A., Nesladek, M., Daenen, M., Michaelson, S., Hoffman, A., Osawa, E., Haenen, K. and Jackman, R. B., "Growth, electronic properties and applications of nanodiamond" Diamond Relat. Mater. 17 (2008) 1080.
21. Williams, O. A., Douhéret, O., Daenen, M., Haenen, K., Osawa, E. and Takahashi, M., "Enhanced diamond nucleation on monodispersed nanocrystalline diamond" Chem. Phys. Lett. 445 (2007) 255.
22. Kriele, A., Williams, O. A., Wolfer, M., Brink, D., Müller-Sebert, W. and Nebel, C. E., Appl. Phys. Lett. 95 (2009) 031905.
23. Timoshenko, S. and Woinowsky-Krieger, S., "Theory of Plates and Shells", 2nd ed., McGraw-Hill, New York, (1959).
24. Sah, R.E., Kirste, L., Baeumler, M., Hiesinger, P., Cimalla, V., Lebedev, V., Baumann, H. and Zschau, H.-E., "Residual Stress Stability in Fiber Textured Stoichiometric AlN Film Grown Using RF Magnetron Sputtering" J. Vac. Sci. Tech. in print (2010).