Optical properties of nanocrystalline diamond films from mid-infrared to ultraviolet using reflectometry and ellipsometry

Journal of Materials Science: Materials in Electronics

Volumn 18, Issue SUPPL. 1, 2007, Pages 37-41

  Hu, Z G ^a   Prunici, P ^a   Hess, Peter ^a   Chen, K H ^b  

^a UNIVERSITY OF HEIDELBERG   (Germany)

^b INSTITUTE OF ATOMIC AND MOLECULAR SCIENCES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FOUR-LAYER STRUCTURE; NANOCRYSTALLINE DIAMOND (NCD) FILMS; SELLMEIER MODEL; SINGLE-OSCILLATOR MODEL;

ELLIPSOMETRY; NANOCRYSTALLINE MATERIALS; OPTICAL PROPERTIES; REFLECTOMETERS; REFRACTIVE INDEX; SINGLE CRYSTALS;

DIAMOND FILMS;

EID: 34547576514     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-007-9175-y     Document Type: Conference Paper

References (17)

1. L.C. Chen, P.D. Kichambare, K.H. Chen, J.-J. Wu, J.R. Yang, S.T. Lin, J. Appl. Phys. 89, 753 (2001)
2. J.-J. Wu, C.H. Ku, T.C. Wong, C.T. Wu, K.H. Chen, L.C. Chen, Thin Solid Films 473, 24 (2005)
3. C.J. Tang, A.J. Neves, M.C. Carmo, Appl. Phys. Lett. 86, 223107 (2005)
4. D.M. Gruen, in Properties, Growth, and Applications of Diamond, ed. by M.H. Nazare, A.J. Neves (The Institute of Electrical Engineers, London, 2001)
5. S. Jiao, A. Sumart, M.A. Kirk, D.M. Gruen, A.R. Krauss, O. Auciello, J. Appl. Phys. 90, 118 (2001)
6. Z.H. Shen, P. Hess, J.P. Huang, Y.C. Lin, K.H. Chen, L.C. Chen, S.T. Lin, J. Appl. Phys. 99, 124302 (2006)
7. S. Gupta, B.R. Weiner, G. Morell, J. Appl. Phys. 90, 1280 (2001)
8. S. Gupta, B.R. Weiner, G. Morell, J. Appl. Phys. 92, 5457 (2002)
9. S. Logothetidis, J. Petals, S. Ves, J. Appl. Phys. 79, 1040 (1996)
10. A.V. Osipov, P. Patzner, P. Hess, Appl. Phys. A 82, 275 (2006)
11. Z.G. Hu, P. Hess, Appl. Phys. Lett. 89, 081906 (2006)
12. R.M.A. Azzam, N.M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977)
13. E.D. Palik, Handbook of Optical Constants of Solid (Academic, Orlando, FL, 1985)
14. Z.Y. Chen, J.P. Zhao, J. Appl. Phys. 87, 4268 (2000)
15. S. Logothetidis, M. Gioti, S. Lousinian, S. Fotiadou, Thin Solid Films 482, 126 (2005)
16. S.H. Wemple, M. DiDomenico Jr., Phys. Rev. Lett. 23, 1156 (1969)
17. K. Karch, T. Dietrich, W. Windl, P. Pavone, A.P. Mayer, D. Strauch, Phys. Rev. B 53, 7259 (1996)