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Applied Physics Letters

Volumn 98, Issue 4, 2011, Pages

Top-down fabrication of AlGaN/GaN nanoribbons

(2) Azize, M a Palacios, T a

a Massachusetts Institute of Technology Cambridge (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGAN/GAN; ELECTRICAL AND STRUCTURAL PROPERTIES; MECHANICAL STRESS; NANORIBBONS; PLANAR STRUCTURE; SILICON SUBSTRATES; SURFACE PASSIVATION; TOP-DOWN FABRICATION; TOP-DOWN TECHNOLOGY;

ELECTRIC PROPERTIES; FABRICATION; PASSIVATION; PLASMA ETCHING; STRESSES;

GALLIUM NITRIDE;

EID: 79551639026 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3544048 Document Type: Article

Times cited : (51)

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