MEMS devices for laser camera systems for endoscopic applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7594, Issue , 2010, Pages

  Drabe, Christian ^a   James, Richard ^b   Schenk, Harald ^a   Sandner, Thilo ^a  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

^b MICROVISION INC   (United States)

Author keywords

BSOI; Camera; CMOS; Comb fingers; Endoscope; Interdigital; LASER; MEMS; Micro scanner; MOEMS; Resonant; Single crystal

Indexed keywords

BEAM IMAGING; CMOS; COMB FINGERS; DIE SIZE; ENDOSCOPIC APPLICATIONS; INTERDIGITAL; LASER CAMERA SYSTEM; MEASUREMENT RESULTS; MECHANICAL SCAN; MEMSDEVICES; MICRO-SCANNERS; NEW DEVICES; TECHNOLOGICAL DEVELOPMENT;

CAMERAS; CMOS INTEGRATED CIRCUITS; DIES; MIRRORS; OPTICAL SYSTEMS; OPTOELECTRONIC DEVICES; SCANNING; SINGLE CRYSTALS; TECHNOLOGICAL FORECASTING;

MOEMS;

EID: 77951619120     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.846855     Document Type: Conference Paper

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