Fabrication and characterization of a dynamically flat high resolution micro-scanner

Journal of Optics A: Pure and Applied Optics

Volumn 10, Issue 4, 2008, Pages

  Hsu, S ^a   Klose, T ^a   Drabe, C ^a   Schenk, H ^a  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

Backside reinforcement; Display scanner; Dynamic deformation; MEMS; Micromirror

Indexed keywords

IMAGE RESOLUTION; LASER OPTICS; MEMS; MIRRORS; REACTIVE ION ETCHING;

BACKSIDE REINFORCEMENT; DISPLAY SCANNERS; DYNAMIC DEFORMATION; MICROMIRRORS;

MICROOPTICS;

EID: 43049083722     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/10/4/044005     Document Type: Article

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