A Fourier transform spectrometer using resonant vertical comb actuators

Journal of Micromechanics and Microengineering

Volumn 16, Issue 12, 2006, Pages 2517-2523

  Ataman, Caglar ^a   Urey, Hakan ^a   Wolter, Alexander ^b  

^a KOÇ UNIVERSITY   (Turkey)

^b FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DIFFRACTION GRATINGS; INTERFEROMETERS; MICROMACHINING; OPTICAL PROPERTIES; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SPECTROMETERS;

AMBIENT PRESSURE; LAMELLAR GRATING INTERFEROMETER (LGI); SPECTRAL RESOLUTION; VERTICAL COMB ACTUATORS;

FOURIER TRANSFORMS;

EID: 33846049579     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/12/001     Document Type: Article

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