Silicon comb-drive X-Y microstage with frame-in-the-frame architecture for MOEMS applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7362, Issue , 2009, Pages

  Laszczyk, Karolina ^a   Bargiel, Sylwester ^a   Krȩzel, Jerzy ^b   Gorecki, Christophe ^a   Kujawińska, Malgorzata ^b  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^b WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Comb drive actuator; DRIE; Microlens scanner; MOEMS; SOI; X Y microstage

Indexed keywords

COMB-DRIVE ACTUATOR; DRIE; MICROLENS SCANNER; MOEMS; SOI; X-Y MICROSTAGE;

ACTUATORS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROLENSES; MONOLITHIC INTEGRATED CIRCUITS; SMART SENSORS;

SCANNING;

EID: 69949145504     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.821460     Document Type: Conference Paper

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