MEMS Stage Integrated with Microlens Arrays for High-Resolution Beam Steering

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 1319-1322

  Kutal Gokce, Sertan ^a   Holmstrom, Sven ^a   Hibert, Cyrille ^b   Ataman, Caglar ^b   Arslan, Aslihan ^a   Seren, Huseyin R ^a   Urey, Hakan ^a  

^a KOÇ UNIVERSITY   (Turkey)

^b EPFL   (Switzerland)

Author keywords

Beam steering; Comb drive; Hybrid integration

Indexed keywords

ACTUATION VOLTAGES; AT RESONANCE; BEAM-STEERING; COMB DRIVE; HIGH RESOLUTION; HYBRID INTEGRATION; IN-PLANE; MEMS STAGE; MICRO-LENS ARRAYS; MICRO-MECHANICAL; OUT-OF-PLANE;

MICROOPTICS;

EID: 71549140937     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.329     Document Type: Conference Paper

References (8)

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