-
1
-
-
79551597576
-
Characterization of magnetic nanoparticleembedded SU8 for microactuation
-
Hilton Head, SC Jun. 1-5
-
K. L. Tsai, M. Ziaei-Moayyed, N. Klejwa, R. N. Candler, W. Hu, S. X. Wang, and R. T. Howe, "Characterization of magnetic nanoparticleembedded SU8 for microactuation," in Proc. 13th Solid State Sens., Actuators, Microsyst. Workshop (Hilton Head), Hilton Head, SC, Jun. 1-5, 2008, pp. 178-181.
-
(2008)
Proc. 13th Solid State Sens., Actuators, Microsyst. Workshop (Hilton Head)
, pp. 178-181
-
-
Tsai, K.L.1
Ziaei-Moayyed, M.2
Klejwa, N.3
Candler, R.N.4
Hu, W.5
Wang, S.X.6
Howe, R.T.7
-
2
-
-
27144488401
-
Electrothermally activated SU-8 microgripper for single cell manipulation in solution
-
Aug.
-
N. Chronis and L. P. Lee, "Electrothermally activated SU-8 microgripper for single cell manipulation in solution," J. Microelectromech. Syst., vol. 14, no. 4, pp. 857-863, Aug. 2005.
-
(2005)
J. Microelectromech. Syst.
, vol.14
, Issue.4
, pp. 857-863
-
-
Chronis, N.1
Lee, L.P.2
-
3
-
-
0031221057
-
SU-8: A low-cost negative resist for MEMS
-
Sep.
-
H. Lorenz, M. Despont, N. Fahmi, N. LaBianca, P. Renaud, and P. Vettiger, "SU-8: A low-cost negative resist for MEMS," J. Micromech. Microeng., vol. 7, no. 3, pp. 121-124, Sep. 1997.
-
(1997)
J. Micromech. Microeng.
, vol.7
, Issue.3
, pp. 121-124
-
-
Lorenz, H.1
Despont, M.2
Fahmi, N.3
Labianca, N.4
Renaud, P.5
Vettiger, P.6
-
4
-
-
34347265767
-
SU-8 MEMS Fabry-Perot pressure sensor
-
Jul.
-
G. C. Hill, R. Melamud, F. E. Declercq, A. A. Davenport, I. H. Chan, P. G. Hartwell, and B. L. Pruitt, "SU-8 MEMS Fabry-Perot pressure sensor," Sens. Actuators A, Phys., vol. 138, no. 1, pp. 52-62, Jul. 2007.
-
(2007)
Sens. Actuators A, Phys.
, vol.138
, Issue.1
, pp. 52-62
-
-
Hill, G.C.1
Melamud, R.2
Declercq, F.E.3
Davenport, A.A.4
Chan, I.H.5
Hartwell, P.G.6
Pruitt, B.L.7
-
5
-
-
84876813073
-
Development and characterization of high sensitivity bioinspired artificial haircell sensor
-
Hilton Head, SC Jun. 4-8
-
N. Chen, J. Chen, J. Engel, S. Pandya, C. Tucker, and C. Liu, "Development and characterization of high sensitivity bioinspired artificial haircell sensor," in Proc. 12th Solid State Sens., Actuators, Microsyst. Workshop (Hilton Head), Hilton Head, SC, Jun. 4-8, 2006, pp. 280-283.
-
(2006)
Proc. 12th Solid State Sens., Actuators, Microsyst. Workshop (Hilton Head)
, pp. 280-283
-
-
Chen, N.1
Chen, J.2
Engel, J.3
Pandya, S.4
Tucker, C.5
Liu, C.6
-
6
-
-
12344262702
-
Composite ferromagnetic photoresist for the fabrication of microelectromechanical systems
-
Jan.
-
N. Damean, B. A. Parviz, J. N. Lee, T. Odom, and G. M. Whitesides, "Composite ferromagnetic photoresist for the fabrication of microelectromechanical systems," J. Micromech. Microeng., vol. 15, no. 1, pp. 29-34, Jan. 2005.
-
(2005)
J. Micromech. Microeng.
, vol.15
, Issue.1
, pp. 29-34
-
-
Damean, N.1
Parviz, B.A.2
Lee, J.N.3
Odom, T.4
Whitesides, G.M.5
-
7
-
-
0029488598
-
Magnetic microactuation of torsional polysilicon structures
-
Stockholm, Sweden Jun. 25-29
-
J. W. Judy and R. S. Muller, "Magnetic microactuation of torsional polysilicon structures," in Proc. 8th Int. Conf. Solid-State Sens. Actuators Dig. Tech. Papers (Transducers), Stockholm, Sweden, Jun. 25-29, 1995, vol. 1, pp. 332-335.
-
(1995)
Proc. 8th Int. Conf. Solid-State Sens. Actuators Dig. Tech. Papers (Transducers)
, vol.1
, pp. 332-335
-
-
Judy, J.W.1
Muller, R.S.2
-
8
-
-
0031237318
-
Magnetically actuated, addressable microstructures
-
Sep.
-
J. W. Judy and R. S. Muller, "Magnetically actuated, addressable microstructures," J. Microelectromech. Syst., vol. 6, no. 3, pp. 249-256, Sep. 1997.
-
(1997)
J. Microelectromech. Syst.
, vol.6
, Issue.3
, pp. 249-256
-
-
Judy, J.W.1
Muller, R.S.2
-
9
-
-
50049095267
-
Transparent SU-8 three-axis micro strain gauge force sensing pillar arrays for biological applications
-
Lyon, France Jun. 10-14
-
N. Klejwa, N. Harjee, R. Kwon, S. M. Coulthard, and B. L. Pruitt, "Transparent SU-8 three-axis micro strain gauge force sensing pillar arrays for biological applications," in Proc. 14th Int. Conf. Solid-State Sens., Actuators, Microsyst. (Transducers), Lyon, France, Jun. 10-14, 2007, pp. 2259-2262.
-
(2007)
Proc. 14th Int. Conf. Solid-State Sens., Actuators, Microsyst. (Transducers)
, pp. 2259-2262
-
-
Klejwa, N.1
Harjee, N.2
Kwon, R.3
Coulthard, S.M.4
Pruitt, B.L.5
-
12
-
-
33749554122
-
-
Englewood Cliffs NJ: Prentice-Hall
-
C. Liu, Foundations of MEMS. Englewood Cliffs, NJ: Prentice-Hall, 2006.
-
(2006)
Foundations of MEMS
-
-
Liu, C.1
-
13
-
-
0030704418
-
Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon
-
Nagoya, Japan Jan. 26-30
-
W. N. Sharpe, Jr., B. Yuan, R. Vaidyanathan, and R. L. Edwards, "Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon," in Proc. 10th Annu. Int.Workshop Micro ElectroMech. Syst., Nagoya, Japan, Jan. 26-30, 1997, pp. 424-429.
-
(1997)
Proc. 10th Annu. Int.Workshop Micro ElectroMech. Syst.
, pp. 424-429
-
-
Sharpe Jr., W.N.1
Yuan, B.2
Vaidyanathan, R.3
Edwards, R.L.4
-
14
-
-
79551578554
-
-
Microchem Corporation USA. [Online]. Available
-
Microchem Corporation USA. [Online]. Available: http://www. microchem.com
-
-
-
-
15
-
-
0242637018
-
Mechanical strength and interfacial failure analysis of cantilevered SU-8 microposts
-
Nov.
-
H. S. Khoo, K.-K. Liu, and F.-G. Tseng, "Mechanical strength and interfacial failure analysis of cantilevered SU-8 microposts," J. Micromech. Microeng., vol. 13, no. 6, pp. 822-831, Nov. 2003.
-
(2003)
J. Micromech. Microeng.
, vol.13
, Issue.6
, pp. 822-831
-
-
Khoo, H.S.1
Liu, K.-K.2
Tseng, F.-G.3
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