-
1
-
-
27144488401
-
Electrothermally Activated SU-8 Microgripper for Single Cell Manipulation in Solution
-
N. Chronis and L. P. Lee, “Electrothermally Activated SU-8 Microgripper for Single Cell Manipulation in Solution”, Journal of Microelectromechanical Systems, 14, 4 (2005).
-
(2005)
Journal of Microelectromechanical Systems
, vol.14
, Issue.4
-
-
Chronis, N.1
Lee, L.P.2
-
2
-
-
0031221057
-
SU-8: A Low-cost Negative Resist for MEMS
-
H. Lorenz, M. Despont, N. Fahmi, N. LaBianca, P. Renaud, and P. Vettiger, “SU-8: A Low-cost Negative Resist for MEMS”, Journal of Micromechanics and Microengineering, 7 (1997).
-
(1997)
Journal of Micromechanics and Microengineering
, vol.7
-
-
Lorenz, H.1
Despont, M.2
Fahmi, N.3
Labianca, N.4
Renaud, P.5
Vettiger, P.6
-
3
-
-
34347265767
-
SU-8 MEMS Fabry-Perot Pressure Sensor
-
G.C. Hill, R. Melamud, F.E. Declercq, A.A. Davenport, I.H. Chan, P.G. Hartwell, and B.L. Pruitt, “SU-8 MEMS Fabry-Perot Pressure Sensor”, Sensors and Actuators A: Physical, 138, 1 (2007).
-
(2007)
Sensors and Actuators A: Physical
, vol.138
, pp. 1
-
-
Hill, G.C.1
Melamud, R.2
Declercq, F.E.3
Davenport, A.A.4
Chan, I.H.5
Hartwell, P.G.6
Pruitt, B.L.7
-
4
-
-
84876813073
-
Development and Characterization of High Sensitivity Bioinspired Artificial Haircell Sensor
-
Hilton Head, Hilton Head Island, SC, 6/4-8/06
-
th Solid State Sensors, Actuator, and Microsystems Workshop (Hilton Head 2006), Hilton Head Island, SC, 6/4-8/06.
-
(2006)
th Solid State Sensors, Actuator, and Microsystems Workshop
-
-
Chen, N.1
Chen, J.2
Engel, J.3
Pandya, S.4
Tucker, C.5
Liu, C.6
-
5
-
-
12344262702
-
Composite Ferromagnetic Photoresist for the Fabrication of Microelectromechanical Systems
-
N. Damean, B. A. Parviz, J. N. Lee, T. Odom, and G. M. Whitesides, “Composite Ferromagnetic Photoresist for the Fabrication of Microelectromechanical Systems”, Journal of Micromechanics and Microengineering, 15 (2005).
-
(2005)
Journal of Micromechanics and Microengineering
, vol.15
-
-
Damean, N.1
Parviz, B.A.2
Lee, J.N.3
Odom, T.4
Whitesides, G.M.5
-
6
-
-
0029488598
-
Magnetic Microactuation of Torsional Polysilicon Structures
-
Stockholm, Sweden, 6/25-29/95
-
th International Conference on Solid-State Sensors and Actuators Digest of Technical Papers (Transducers 1995), Stockholm, Sweden, 6/25-29/95, vol. 1, pp. 332-335.
-
th International Conference on Solid-State Sensors and Actuators Digest of Technical Papers (Transducers 1995)
, vol.1
, pp. 332-335
-
-
Judy, J.W.1
Muller, R.S.2
-
7
-
-
0031237318
-
Magnetically Actuated, Addressable Microstructures
-
J. W. Judy and R. S. Muller, “Magnetically Actuated, Addressable Microstructures”, Journal of Microelectromechanical Systems, 6, 3 (1997).
-
(1997)
Journal of Microelectromechanical Systems
, vol.6
, pp. 3
-
-
Judy, J.W.1
Muller, R.S.2
-
9
-
-
33749554122
-
-
Upper Saddle River, NJ, Pearson/Prentice Hall
-
C. Liu, Foundations of MEMS, Upper Saddle River, NJ, Pearson/Prentice Hall (2006).
-
(2006)
Foundations of MEMS
-
-
Liu, C.1
-
10
-
-
0030704418
-
Measurements of Young’s Modulus, Poisson’s Ratio, and Tensile Strength of Polysilicon
-
Nagoya, Japan, 1/26-30/97
-
th Annual International Workshop on Micro Electro Mechanical Systems, Nagoya, Japan, 1/26-30/97, pp. 424-429.
-
th Annual International Workshop on Micro Electro Mechanical Systems
, pp. 424-429
-
-
Sharpe, W.N.1
Yuan, B.2
Vaidyanathan, R.3
Edwards, R.L.4
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