Development and characterization of high-sensitivity bioinspired artificial haircell sensor

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2006, Pages 280-283

  Chen, Nannan ^a   Chen, Jack ^a   Engel, Jonathan ^a   Pandya, Saunvit ^a   Tucker, Craig ^a   Liu, Chang ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ASPECT RATIO; MICROSYSTEMS; NATURAL FREQUENCIES;

DEVICE CHARACTERIZATION; DIPOLE FIELDS; HIGH ASPECT RATIO; HIGH SENSITIVITY; RATE SENSITIVITY; SENSITIVITY THRESHOLD; SILICON PIEZORESISTIVE; STRAIN SENSORS;

SOLID-STATE SENSORS;

EID: 84876813073     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. J. T. Albert, O. C. Friedrich, H.-E. Denchant, and F. G. Barth, "Arthropod Touch Reception: Spider Hair Sensilla as Rapid Touch Detectors," Journal of Comparative Physiology A, vol. 187, pp. 303-312, 2001.
2. F. G. Barth, "Spider Mechanoreceptors," Current Opinion inNeurobiology, vol. 14, pp. 415-422, 2004.
3. Y. Ozaki, T. Ohyama, T. Yasuda, and I. Shimoyama, "Air flow sensor modeled on wind receptor hairs of insects," presented at IEEE International Conference On MEMS, 2000.
4. J. v. Baar, M. Dijkstra, R. Wiegerink, T. Lammerink, R. d. Boer, and G. Krijnen, "Arrays of cricket-inspired sensory hairs with capacitive motion detection," presented at IEEE Inernational Conference on MEMS, Miami Beach, FL, 2005.
5. J. Engel, J. Chen, N. Chen, and C. Liu, "Development and Characterization of an Artificial Hair Cell Based on Polyurethane Elastomer and Force Sensitive Resistors," The 4th IEEE International Conference on Sensors, Irvine, California, 31 Oct-1 Nov, 2005.
6. J. A. Harley and T. W. Kenny, “1/f Noise Consideration for the Design and Process Optimization of Piezoresistive Cantilevers,” JMEMS, vol 9, no. 2, June 2000.
7. J. Chen, J. Engel, N. Chen, S. Pandya, S. Coombs, and C. Liu, "Artificial Lateral Line and Hydrodynamic Object Tracking," MEMS 2006 Conference, Istanbul, Turkey, January 22-26, 2006