SU-8 MEMS Fabry-Perot pressure sensor

Sensors and Actuators, A: Physical

Volumn 138, Issue 1, 2007, Pages 52-62

  Hill, G C ^a   Melamud, R ^b   Declercq, F E ^b   Davenport, A A ^b   Chan, I H ^c   Hartwell, P G ^d   Pruitt, B L ^b  

^a STANFORD UNIVERSITY   (United States)

^b Stanford University   (United States)

^c STANFORD UNIVERSITY SCHOOL OF MEDICINE   (United States)

^d HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

Biomedical device; Fabry Perot; Interferometer; Pressure sensor; SU 8

Indexed keywords

BIOCOMPATIBILITY; BIOMEDICAL EQUIPMENT; FABRY-PEROT INTERFEROMETERS; HYSTERESIS; MICROELECTROMECHANICAL DEVICES; TRANSDUCERS;

DISPLACEMENT TRANSDUCERS; MICRODEVICES; PRESSURE RESPONSE; SU-8 MEMS FABRY-PEROT PRESSURE SENSOR;

PRESSURE SENSORS;

EID: 34347265767     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.04.047     Document Type: Article

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