Transparent SU-8 three-axis micro strain gauge force sensing pillar arrays for biological applications

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2259-2262

  Klejwa, N ^a   Harjee, N ^a   Kwon, R ^a   Coulthard, S M ^a   Pruitt, B L ^a  

^a Stanford University   (United States)

Author keywords

Force sensor; Strain gauge; SU 8

Indexed keywords

ACTUATORS; FRUIT JUICES; GAGES; METALS; MICROSYSTEMS; OPTICAL SENSORS; OXIDE MINERALS; PHOTORESISTS; QUARTZ; STANDARDS; STRAIN GAGES; TRANSDUCERS;

BIOLOGICAL APPLICATIONS; DROSOPHILA MELANOGASTER; FORCE SENSING; FORCE SENSITIVITY; FORCE SENSOR; FRUIT FLIES; INTERNATIONAL CONFERENCES; INVERTED MICROSCOPES; MICRO-STRAIN; MULTIPLE LAYERS; PILLAR ARRAYS; QUARTZ SUBSTRATES; SOLID-STATE SENSORS; SPECIFIC REQUIREMENTS; STRAIN GAUGE; SU-8; THREE-AXIS;

SENSORS;

EID: 50049095267     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300619     Document Type: Conference Paper

References (6)

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