Mechanisms for nano particle removal in brush scrubber cleaning

Applied Surface Science

Volumn 257, Issue 7, 2011, Pages 3055-3062

  Huang, Yating ^a   Guo, Dan ^a   Lu, Xinchun ^a   Luo, Jianbin ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Brush scrub; Hydrodynamics; Particle removal; Post CMP cleaning

Indexed keywords

ADHESION; DRAG; ELASTICITY; FLOW FIELDS; HYDRODYNAMICS; NANOPARTICLES; POROSITY; SCRUBBERS; STICTION; TRIBOLOGY; VAN DER WAALS FORCES;

HYDRODYNAMIC DRAG FORCES; HYDRODYNAMIC FORCES; HYDRODYNAMIC MODEL; NANO PARTICLE REMOVAL; PARTICLE REMOVAL; POROUS STRUCTURES; POST-CMP CLEANING; ROUGHNESS SURFACES;

CLEANING;

EID: 79251601169     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.10.115     Document Type: Article

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