Particle adhesion and removal mechanisms during brush scrubber cleaning

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 2844-2852

  Xu, K ^a,b   Vos, R ^a   Vereecke, G ^a   Doumen, G ^a   Fyen, W ^a   Mertens, P W ^a   Heyns, M M ^a   Vinckier, C ^b   Fransaer, J ^b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CHEMICAL BONDS; CLEANING; DEFORMATION; DRAG; ELASTIC MODULI; FRICTION; HYDRODYNAMICS; LIGHT SCATTERING; LUBRICATION; MATHEMATICAL MODELS; ROLLING; SHEAR STRESS; SUSPENSIONS (FLUIDS);

DRAG FORCES; FILM THICKNESS; REMOVAL EFFICIENCY; REMOVAL MECHANISMS;

SCRUBBERS;

EID: 13244265986     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1815319     Document Type: Article

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