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Applied Surface Science

Volumn 257, Issue 9, 2011, Pages 3969-3973

Sputtering pressure effects on the structural and mechanical properties of TiVCr alloy coatings

(5) Tsai, Du Cheng a Huang, Yen Lin a Lin, Sheng Ru a Jung, De Ru a Shieu, Fuh Sheng a

a NATIONAL CHUNG HSING UNIVERSITY (Taiwan)

Author keywords

Alloy materials; Coating materials; Crystal structure; Microstructure; Thin films; Vapor deposition

Indexed keywords

CHROMIUM ALLOYS; COATINGS; COMPOSITE COATINGS; CRYSTAL MICROSTRUCTURE; CRYSTAL STRUCTURE; CRYSTALS; DEPOSITION; FILMS; HARDNESS; MICROSTRUCTURE; PRESSURE EFFECTS; TERNARY ALLOYS; THIN FILMS; TITANIUM ALLOYS; VAPOR DEPOSITION;

ALLOY MATERIALS; BODY CENTERED CUBIC (BCC) CRYSTAL; COATING MATERIAL; COATING MICROSTRUCTURES; COLUMNAR STRUCTURES; MAGNETRON SPUTTERING SYSTEMS; SPUTTERING PRESSURES; STRUCTURAL AND MECHANICAL PROPERTIES;

VANADIUM ALLOYS;

EID: 78951490890 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2010.11.150 Document Type: Article

Times cited : (11)

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