Properties of amorphous AlCuY alloy metallizations

IECON Proceedings (Industrial Electronics Conference)

Volumn 1, Issue , 1999, Pages 46-49

  Berger, L ^a   Mrosk, J W ^a   Ettl, C ^a   Fecht, H J ^a   Flege, S ^a   Hahn, H ^a   Wolff, U ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ALUMINUM ALLOYS; AMORPHOUS ALLOYS; AMORPHOUS FILMS; ELECTRIC CONDUCTIVITY MEASUREMENT; EVAPORATION; LITHIUM COMPOUNDS; METALLIZING; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC MATERIALS; SENSORS; SINGLE CRYSTALS;

ALUMINUM COPPER YTTRIUM ALLOYS; SURFACE ACOUSTIC WAVE SENSORS;

NANOTECHNOLOGY;

EID: 0033282069     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)