Investigation of structure, adhesion strength, wear performance and corrosion behavior of platinum/ruthenium/nitrogen doped diamond-like carbon thin films with respect to film thickness

Materials Chemistry and Physics

Volumn 126, Issue 1-2, 2011, Pages 220-226

  Khun, N W ^a   Liu, E ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Corrosion; DC magnetron sputtering; DLC thin film; Film thickness; NaCl electrolyte; Pt Ru N doping; Wear

Indexed keywords

DC MAGNETRON SPUTTERING; DLC THIN FILMS; NACL ELECTROLYTE; PT/RU/N DOPING; WEAR;

ADHESION; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; BOND STRENGTH (MATERIALS); CARBON FILMS; CORROSION; CRYSTAL ATOMIC STRUCTURE; DEPOSITION; DIAMOND LIKE CARBON FILMS; DOPING (ADDITIVES); ELECTROLYTES; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SODIUM CHLORIDE; SURFACE STRUCTURE; THIN FILMS; VAPOR DEPOSITION; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

FILM THICKNESS;

EID: 78751634451     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2010.11.036     Document Type: Article

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