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Thin Solid Films

Volumn 517, Issue 17, 2009, Pages 4762-4766

Effect of substrate temperature on corrosion performance of nitrogen doped amorphous carbon thin films in NaCl solution

(2) Khun, N W a Liu, E a

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

A C:N thin film; Corrosion; DC magnetron sputtering; Potentiodynamic polarization; Substrate temperature

Indexed keywords

A-C: N FILMS; A-C:N THIN FILM; ADHESION STRENGTHS; AMORPHOUS CARBON THIN FILMS; BONDING STRUCTURE; CORROSION BEHAVIOR; CORROSION PERFORMANCE; DC MAGNETRON SPUTTERING; LINK STRUCTURE; MICRO RAMAN SPECTROSCOPY; NACL SOLUTION; NITROGEN-DOPED; POTENTIODYNAMIC POLARIZATION TESTS; ROOM TEMPERATURE; SCRATCH TESTING; SI SUBSTRATES; SUBSTRATE TEMPERATURE;

AMORPHOUS CARBON; AMORPHOUS SILICON; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; CARBON FILMS; CORROSION RESISTANCE; CRYSTAL ATOMIC STRUCTURE; MAGNETRONS; METALLIC FILMS; POLARIZATION; POTENTIODYNAMIC POLARIZATION; SEMICONDUCTING SILICON COMPOUNDS; SODIUM CHLORIDE; SPECTRUM ANALYSIS; SUBSTRATES; SURFACE STRUCTURE; SURFACE TESTING; THERMAL EFFECTS; THIN FILM DEVICES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS FILMS;

EID: 65649088669 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2009.03.030 Document Type: Article

Times cited : (21)

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