Influence of carbon sputtering power on structure, corrosion resistance, adhesion strength and wear resistance of platinum/ruthenium/nitrogen doped diamond-like carbon thin films

Surface and Coatings Technology

Volumn 205, Issue 3, 2010, Pages 853-860

  Khun, N W ^a   Liu, E ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Corrosion; DLC thin film; Magnetron sputtering; Pt Ru N doping

Indexed keywords

ADHESION STRENGTHS; BONDING STRUCTURE; CHEMICAL COMPOSITIONS; CORROSION BEHAVIOR; DC MAGNETRON SPUTTERING; DLC FILM; DLC THIN FILMS; DOPED DIAMOND-LIKE CARBON; MICRO RAMAN SPECTROSCOPY; MICRO-SCRATCH TEST; NACL SOLUTION; POROSITY LEVEL; POTENTIODYNAMIC POLARIZATION TESTS; PT/RU/N DOPING; SI SUBSTRATES; SPUTTERING POWER; TRIBOMETERS; WEAR PERFORMANCE;

ADHESION; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; BOND STRENGTH (MATERIALS); CARBON FILMS; CONDUCTIVE FILMS; CORROSION RESISTANCE; CRYSTAL ATOMIC STRUCTURE; DC POWER TRANSMISSION; DEPOSITION; DOPING (ADDITIVES); FILM GROWTH; INORGANIC COATINGS; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SODIUM CHLORIDE; SURFACE STRUCTURE; THIN FILMS; VAPOR DEPOSITION; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

DIAMOND LIKE CARBON FILMS;

EID: 77956649687     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.08.023     Document Type: Article

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