Direct writing laser of high aspect ratio epoxy microstructures

Journal of Micromechanics and Microengineering

Volumn 21, Issue 1, 2011, Pages

  Cadarso, V J ^a   Pfeiffer, K ^b   Ostrzinski, U ^b   Bureau, J B ^a   Racine, G A ^a   Voigt, A ^b   Gruetzner, G ^b   Brugger, J ^a  

^a EPFL   (Switzerland)

^b MICRO RESIST TECHNOLOGY GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COST-EFFICIENT; DIRECT WRITE; DIRECT WRITING; EPOXY MATERIAL; FAST PROTOTYPING; HIGH ASPECT RATIO; MICRO ELECTRO MECHANICAL SYSTEM; PROCESSING METHOD;

MICROELECTROMECHANICAL DEVICES;

ASPECT RATIO;

EID: 78651502636     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/1/017003     Document Type: Article

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