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Volumn 1, Issue 1, 2009, Pages 572-575

Biaxial and Uniaxial Epoxy Accelerometers

Author keywords

Accelerometer; Biaxial; Optical; Polymer; Uniaxial; Waveguide

Indexed keywords

A-FRAMES; FABRICATION PROCESS; LIGHT INTENSITY; LOW COSTS; MICROMACHINING TECHNIQUES; OPTICAL; OPTICAL ACCELEROMETER; OPTICAL PATH; OPTICAL POLYMERS; POLYMER WAVEGUIDES; SEISMIC MASS; UNIAXIAL WAVEGUIDES; WAFER SCALE;

EID: 71549132215     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.143     Document Type: Conference Paper
Times cited : (4)

References (8)
  • 2
    • 68249133259 scopus 로고    scopus 로고
    • Young's Modulus Measurement Of Three Different Photo Definable Epoxies Used For Micro Fabrication
    • Wouters K., and Puers R. Young's Modulus Measurement Of Three Different Photo Definable Epoxies Used For Micro Fabrication. Eurosensors (2008) 835-838
    • (2008) Eurosensors , pp. 835-838
    • Wouters, K.1    Puers, R.2
  • 3
    • 21044436903 scopus 로고    scopus 로고
    • Fabrication of high-aspect-ratio microstructures using SU8 photoresist
    • Liu G., Tian Y., and Kan Y. Fabrication of high-aspect-ratio microstructures using SU8 photoresist. Microsys. Tech. 11 (2005) 343-346
    • (2005) Microsys. Tech. , vol.11 , pp. 343-346
    • Liu, G.1    Tian, Y.2    Kan, Y.3
  • 5
    • 33646754865 scopus 로고    scopus 로고
    • Waveguide and packaging technology for optical backplanes and hybrid electricaloptical circuit boards
    • H. Schröder, J. Bauer, F. Ebling, M. Franke, A. Beier, P. Demmer, et al., Waveguide and packaging technology for optical backplanes and hybrid electricaloptical circuit boards, Proc. of SPIE, Vol. 6124 612407-1.
    • Proc. of SPIE , vol.6124 , pp. 612407-612411
    • Schröder, H.1    Bauer, J.2    Ebling, F.3    Franke, M.4    Beier, A.5    Demmer, P.6
  • 6
    • 44949086462 scopus 로고    scopus 로고
    • A low-cost and highly integrated fiber optical pressure sensor system
    • Ceyssens F., Driesen M., Wouters K., and Puers R. A low-cost and highly integrated fiber optical pressure sensor system. Sensors and Actuators, A 145-146 (2008) 81-86
    • (2008) Sensors and Actuators, A , vol.145-146 , pp. 81-86
    • Ceyssens, F.1    Driesen, M.2    Wouters, K.3    Puers, R.4
  • 7
    • 0022805903 scopus 로고
    • Tilt, Offset, and End-Separation Loss of Lowest-Order Slab Waveguide Mode
    • Marcuse D. Tilt, Offset, and End-Separation Loss of Lowest-Order Slab Waveguide Mode. Journal of Lightwave Technology LT-4 11 (1986 (November)) 1647-1650
    • (1986) Journal of Lightwave Technology , vol.LT-4 , Issue.11 , pp. 1647-1650
    • Marcuse, D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.