Fabrication of two-dimensional photonic crystal patterns on GaN-based light-emitting diodes using thermally curable monomer-based nanoimprint lithography

Applied Physics Letters

Volumn 91, Issue 9, 2007, Pages

  Byeon, Kyeong Jae ^a   Hwang, Seon Yong ^a   Lee, Heon ^a  

^a Korea University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CURING; ETCHING; INDUCTIVELY COUPLED PLASMA; LIGHT EMITTING DIODES; MICROFABRICATION; MONOMERS; NANOIMPRINT LITHOGRAPHY; PHOTOLUMINESCENCE; TWO DIMENSIONAL;

CRYSTAL PATTERNS; IMPRINTED PATTERNS; LOW ETCH SELECTIVITY;

PHOTONIC CRYSTALS;

CRYSTALS; ETCHING; LITHOGRAPHY; MONOMERS;

EID: 34548431305     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2776980     Document Type: Article

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