Extremely thin SOI (ETSOI) technology: Past, present, and future

Proceedings - IEEE International SOI Conference

Volumn , Issue , 2010, Pages

  Cheng, K ^a   Khakifirooz, A ^a   Kulkarni, P ^a   Ponoth, S ^a   Kuss, J ^a   Edge, L F ^a   Kimball, A ^a   Kanakasabapathy, S ^a   Schmitz, S ^a   Reznicek, A ^a   Adam, T ^a   He, H ^a   Mehta, S ^a   Upham, A ^a   Seo, S C ^a   Herman, J L ^a   Johnson, R ^a   Zhu, Y ^b   Jamison, P ^a   Haran, B S ^a   Zhu, Z ^a   Fan, S ^a   Bu, H ^a   Sadana, D K ^b   Kozlowski, P ^a   O'Neill, J ^a   Doris, B ^a   Shahidi, G ^a   more..

^a IBM RESEARCH   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BULK DEVICES; CMOS SCALING; FULLY DEPLETED DEVICES; FUTURE TECHNOLOGIES; THIN SOI;

EID: 78650583054     PISSN: 1078621X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SOI.2010.5641473     Document Type: Conference Paper

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