Lewis-base copper(I) formates: Synthesis, reaction chemistry, structural characterization and their use as spin-coating precursors for copper deposition

Inorganica Chimica Acta

Volumn 365, Issue 1, 2011, Pages 10-19

  Tuchscherer, André ^a   Shen, Yingzhong ^a   Jakob, Alexander ^a   Mothes, Robert ^a   Al Anber, Mohammed ^a   Walfort, Bernhard ^a   Rüffer, Tobias ^a   Frühauf, Swantje ^a   Ecke, Ramona ^a   Schulz, Stephan E ^a   Gessner, Thomas ^a   Lang, Heinrich ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Carboxylic acid; Copper; Formate; Hydrogen bonding; Spin coating

Indexed keywords

ATOMS; CARBOXYLATION; CARBOXYLIC ACIDS; COATINGS; COPPER; CRYSTAL ATOMIC STRUCTURE; FORMIC ACID; HYDROGEN; HYDROGEN BONDS; METALLIC FILMS; MOLECULAR OXYGEN; ORGANOMETALLICS; SILICON OXIDES; SILICON WAFERS; SPIN COATING; TITANIUM NITRIDE;

ANNEALING CONDITION; FORMATE; GAP-FILLING PROCESS; OXIDIZED SILICON WAFERS; SPIN COATING PROCESS; STRUCTURAL CHARACTERIZATION; SYNTHESIS METHODOLOGY; TRANSFORMATION BEHAVIOR;

COPPER COMPOUNDS;

EID: 78650563325     PISSN: 00201693     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ica.2010.05.048     Document Type: Article

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