Copper(I) carboxylates of type [(nBu3P) mCuO2CR] (m = 1, 2, 3) - Synthesis, properties, and their use as CVD precursors

Zeitschrift fur Anorganische und Allgemeine Chemie

Volumn 634, Issue 12-13, 2008, Pages 2226-2234

  Jakob, Alexander ^a   Shen, Yingzhong ^a   Wächtler, Thomas ^a   Schulz, Stefan E ^a   Gessner, Thomas ^a   Riedel, Ralf ^b   Fasel, Claudia ^b   Lang, Heinrich ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Carboxylates; Copper; CVD; DSC; EDX; Electrolysis; SEM; TG; Tri n butylphosphane

Indexed keywords

EID: 53849104304     PISSN: 00442313     EISSN: 15213749     Source Type: Journal    
DOI: 10.1002/zaac.200800189     Document Type: Article

References (45)

1. H. K. Shin, K. M. Chi, M. J. Hampden-Smith, T. T. Kodas, M. F. Paffett, J. D. Farr, Chem. Mater. 1992, 4, 788.
2. T. H. Baum, C. E. Larson, Chem. Mater. 1992, 4, 365.
3. A. Grodzicki, I. Łakomska, P. Piszczek, I. Szymańska, E. Szłyk, Coord. Chem. Rev. 2005, 249, 2232.
4. J. Li, R. Blewer, J. W. Mayer, MRS Bull. 1993, 18, 18.
5. T. L. Alford, J. Li, J. W. Mayer, S. Q. Wang, Thin Solid Films 1995, 262, VII.
6. P. L. Pai, C. H. Ting, IEEE Electron Device Lett. 1989, 10, 423.
7. T. T. Kodas, M. J. Hampden-Smith, The Chemistry of Metal CVD VCH, Weinheim 1994.
8. A. Jain, K. M. Chi, H. K. Shin, J. Farkas, T. T. Kodas, M. J. Hampden-Smith, Semicond. Int. 1993, 16, 128.
9. H. K. Shin, M. J. Hampden-Smith, E. N. Duesler, Can. J. Chem. 1992, 70, 2954.
10. D. B. Beach, F. K. Legoues, C. K. Hu, Chem. Mater. 1990, 2, 216.
11. a) G. Papadimitropoulos, D. Davazoglou, Surf. Coat. Technol., 2007, 201, 8935;
12. b) D. Garg, H. Cheng, J. A. T. Norman, E. Machado, P. Ordejon, US Pat. Appl. Publ. 2004, US 20040234704;
13. c) M. Joulaud, C. Angekort, P. Doppelt, T. Mourier, D. Mayer, Microelectron. Eng. 2002, 64, 107.
14. H. Lang, D. S. A. George, G. Rheinwald, Coord. Chem. Rev. 2000, 206-207, 101.
15. N. A. Clinton, J. K. Kochi, J. Organomet. Chem. 1972, 42, 229.
16. D. J. Darensbourg, M. W. Holteamp, B. Khandelwal, J. H. Reibenspies, Inorg. Chem. 1994, 33, 531-537.
17. B. Goinez-lor, M. Iglesias, C. Cascales, E. Gutierrez-Puebla, M. A. Monge, Chem. Mater. 2001, 13, 1364.
18. M. B. Dines, Inorg. Chem. 1972, 11, 2949.
19. A. Bayler, A. Schier, H. Schmidbaur, Inorg. Chem. 1998, 37, 4353.
20. T. Miyaji, Z. Xi, K. Nakajima, T. Takahashi, Organometallics 2001, 20, 2859.
21. E. Sztyk, P. Piszczek, A. Grodzicki, M. Chaberski, A. Golinski, J. Szatkowski, T. Blaszczyk, Chem. Vap. Deposition 2001, 7(3), 111.
22. H. Schmidt, Y. Shen, M. Leschke, Th. Haase, K. Kohse-Höinghaus, H. Lang, J. Organomet. Chem. 2003, 669 (1-2), 25.
23. a) F. A. Cotton, W. H. Tbsley, Inorg. Chem. 1982, 21, 300;
24. b) M. A. Gil, W. Maringgele, S. Dechert, F. Meyer, Z. Anorg. Allg. Chem. 2007, 633, 2178.
25. J. N. Van Niekerk, F. R. L. Schoening, J. H. Talbot, Acta Crystallogr. 1953, 6, 720.
26. N. W. Alcock, V. L. Tracy, Acta Crystallogr. 1971, B35, 406.
27. Y. B. Koh, G. G. Christoph, Inorg. Chem. 1978, 17, 2590.
28. J. E. Davis, B. M. Gatehouse, K. S. Murray, J. Chem. Soc., Dalton Trans. 1973, 2523.
29. A. V. R. Varrier, R. S. Krishnan, Spectrochim. Acta, Part A, 1971, 1243.
30. R. G. Griffin, J. D. Ellett, Jr. M. Mehring, J. G. Bullitt, J. S. Wangh, J. Chem. Phys. 1972, 57, 2147.
31. G. B. Deacon, R. J. Phillips, Coord. Chem. Rev. 1980, 33, 227.
32. K. Nakamoto, Infrared Spectra of Inorganic and Coordination Compounds, Wiley, New York, 1963, 198.
33. W. Klemperer, G. C. Pimentel, J. Chem. Phys. 1954, 22, 1399.
34. C. D. Garner, B. Hughes, Adv. Inorg. Chem. Radiochem. 1975, 17, 1.
35. D. A. Edwards, R. Richards, J. Chem. Soc., Dalton Trans. 1975, 637.
36. M. Leschke, Ph. D. Thesis, Chemnitz, Technical University, Germany 2002, http://archiv.tu-chemnitz.de/pub/2002/0031.
37. Y. Shen, H. Pritzkow, B. Walfort, T. Rüffer, H. Lang, Acta Crystallogr. 2004, E60, m91.
38. E. Szlyk, I. Lakomska, A. Grodzicki, Thermochim. Acta 1993, 223, 207.
39. G. A. Bowmaker, Effendy, J. V. Hanna, P. C. Healy, J. C. Reid, C. E. F. Rickard, A. H. White, J. Chem. Soc., Dalton Trans. 2000, 753.
40. a) Z. Yuan, N. H. Dryden, J. J. Vittal, R. J. Puddephatt, Chem. Mater. 1995, 7, 1696;
41. b) S. Berger, S. Braun, H. O. Kalinowski, NMR-Spektroskopie von Nichtmetallen, Georg Thieme Verlag, Stuttgart, 1993, 88, and references therein.
42. H. Schmidt, Diploma thesis, TU Chemnitz, Germany, 2002.
43. A. Furuya, N. Hosoi, Y. Ohshita, J. Appl. Phys. 1995, 78, 5989.
44. F. Fillot, Zs. Tökei, G. P. Beyer, Surf. Sci. 2007, 601, 986.
45. D. A. Edwards, R. Richards, J. Chem. Soc., Dalton Trans. 1973, 2463.