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Volumn 34, Issue 10, 2005, Pages 1307-1309

Roughness and texture correlation of AI films

Author keywords

Electromigration; Roughness; Texture

Indexed keywords

ALUMINUM; ELECTROMIGRATION; MAGNETRONS; PHYSICAL VAPOR DEPOSITION; SURFACE ROUGHNESS; TITANIUM;

EID: 27144502467     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-005-0254-7     Document Type: Article
Times cited : (6)

References (8)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.