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Volumn 34, Issue 10, 2005, Pages 1307-1309
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Roughness and texture correlation of AI films
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Author keywords
Electromigration; Roughness; Texture
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Indexed keywords
ALUMINUM;
ELECTROMIGRATION;
MAGNETRONS;
PHYSICAL VAPOR DEPOSITION;
SURFACE ROUGHNESS;
TITANIUM;
CRYSTALLIZATION TEXTURE;
DIRECT-CURRENT (DC) MAGNETRON;
IONIZED METAL PLASMA PVD (I-PVD);
TI/TIN UNDERLAYERS;
THIN FILMS;
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EID: 27144502467
PISSN: 03615235
EISSN: None
Source Type: Journal
DOI: 10.1007/s11664-005-0254-7 Document Type: Article |
Times cited : (6)
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References (8)
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