Influence of Nitrogen Flow Rate on the Microstructure and Properties of N and Me (Me=Cr, Zr) Co-doped Diamond-like Carbon Films

Journal of Materials Science and Technology

Volumn 26, Issue 11, 2010, Pages 967-972

  Han, Zhiyun ^a   Li, Hongkai ^a   Lin, Guoqiang ^a   Dong, Chuang ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Arc ion plating; Diamond like carbon films; Doping; Nitrogen flow rate

Indexed keywords

AMORPHOUS MATRICES; ARC ION PLATING; CEMENTED CARBIDE SUBSTRATES; CO-DOPED; DEPOSITED FILMS; DIAMOND LIKE CARBON; DOPING; HARDNESS AND ELASTIC MODULUS; MICROSTRUCTURE AND PROPERTIES; NANOCOMPOSITE FILM; NANOCRYSTALLINE PHASE; NITROGEN FLOW RATE; NITROGEN FLOW RATES; PULSED BIAS ARC ION PLATINGS; RAMAN SPECTRA;

AMORPHOUS FILMS; CARBIDES; CARBON FILMS; COBALT; COMPOSITE FILMS; DIAMONDS; DOPING (ADDITIVES); ELASTIC MODULI; HARDNESS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; ION IMPLANTATION; MECHANICAL PROPERTIES; MICROSTRUCTURE; NANOCOMPOSITES; NITROGEN; RAMAN SPECTROSCOPY; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIUM;

DIAMOND LIKE CARBON FILMS;

EID: 78650314310     PISSN: 10050302     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1005-0302(10)60157-0     Document Type: Article

References (23)

1. Wei Q., Narayan J. Int. Mater. Rev. 2000, 45:133.
2. Zhu J.Q., Han J.C., Meng S.H., Li Q., Tan M.L. J. Mater. Sci. Technol. 2003, 19(Suppl. 1):109.
3. Ryu J.T., Honda S.I., Katayama M., Oura K. Curr. Appl. Phys. 2005, 5:387.
4. Hainsworth S.V., Uhure N.J. Int. Mater. Rev. 2007, 52:153.
5. Robertson J. Mater. Sci. Eng. R 2002, 37:129.
6. Choi J., Miyagawa S., Nakao S., Ikeyama M., Miyagawa Y. Diam. Relat. Mater. 2006, 15:948.
7. Liu E., Shi X., Tan H.S., Cheah L.K., Sun Z., Tay B.K., Shi J.R. Surf. Coat. Technol. 1999, 120-121:601.
8. Singh V., Jiang J.C., Meletis E.I. Thin Solid Films 2005, 489:150.
9. Zhang S., Fu Y.Q., Du H.J., Zeng X.T., Liu Y.C. Surf. Coat. Technol. 2002, 162:42.
10. Xu P., Li J.J., Wang Q., Wang Z.L., Gu C.Z., Cui Z. J. Appl. Phys. 2007, 101:014312.
11. Wang D.Y., Chang C.L., Ho W.Y. Surf. Coat. Technol. 1999, 120-121:138.
12. Inkin V.N., Kirpilenko G.G., Dementjev A.A., Maslakov K.I. Diam. Relat. Mater. 2000, 9:715.
13. Byon E., Kim J.K., Rha J.J., Kwon S.C., Mu Z.X., Liu C., Li G.Q. Surf. Coat. Technol. 2007, 201:6670.
14. Chen C.C., Hong F.C.N. Appl. Surf. Sci. 2005, 242:261.
15. Zhang H., Liu L.X., Wang Y.L., Ma H.T., Liu F.L. J. Mater. Sci. Technol. 2007, 23:491.
16. Du J., Zhang P. J. Mater. Sci. Technol. 2007, 23:571.
17. Lin G.Q., Zhao Y.H., Guo H.M., Wang D.Z., Dong C., Huang R.F., Wen L.S. J. Vac. Sci. Technol. A 2004, 22:1218.
18. Ferrari A.C. Diam. Relat. Mater. 2002, 11:1053.
19. Gilkes K.W.R., Sands H.S., Batchelder D.N., Robertson J., Milne W.I. Appl. Phys. Lett. 1997, 70:1980.
20. Musil J. Surf. Coat. Technol. 2000, 125:322.
21. Veprek S. J. Vac. Sci. Technol. A 1999, 17:2401.
22. Patscheider J., Zehnder T., Diserens M. Surf. Coat. Technol. 2001, 146-147:201.
23. Polo M.C., Andujar J.L., Hart A., Robertson J., Milne W.I. Diam. Relat. Mater. 2000, 9:663.