Experiments and theoretical explanation of droplet elimination phenomenon in pulsed-bias arc deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 4, 2004, Pages 1218-1222

  Lin, Guoqiang ^a   Zhao, Yanhui ^a   Guo, Huimei ^a   Wang, Dezhen ^a   Dong, Chuang ^a   Huang, Rongfang ^a   Wen, Lishi ^b  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b INSTITUTE OF METAL RESEARCH   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DUST PLASMA THEORIES; KELVIN ELECTRON VOLTS; NEUTRAL GAS; PULSED-BIAS ARC DEPOSITION (PBAD);

CAPACITANCE; CARRIER CONCENTRATION; ELECTRIC CHARGE; ELECTRIC FIELD EFFECTS; MAGNETIC FILTERS; MATHEMATICAL MODELS; PARTICLE SIZE ANALYSIS; PLASMA OSCILLATIONS; PLASMA SHEATHS; STAINLESS STEEL;

TITANIUM NITRIDE;

EID: 4344636160     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1761071     Document Type: Article

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