Field electron emission from amorphous carbon thin films grown by RF magnetron sputtering

Current Applied Physics

Volumn 5, Issue 4, 2005, Pages 387-391

  Ryu, Jeong Tak ^a   Honda, Shin Ichi ^b   Katayama, Mitsuhiro ^b   Oura, Kenjiro ^b  

^a Daegu University   (South Korea)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

Amorphous carbon; Field electron emission; RF magnetron sputtering; Surface morphology

Indexed keywords

AMORPHOUS FILMS; CARBON; FILM GROWTH; MAGNETRON SPUTTERING; MORPHOLOGY; THIN FILMS;

AMORPHOUS CARBON; FIELD ELECTRON EMISSION;

ELECTRON EMISSION;

EID: 13844320908     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2004.04.003     Document Type: Article

References (27)

1. Himpsel F.J. Knapp J.A. VanVechten J.A. Eastman D.E. Phys. Rev. B 20 1979 624
2. Geis M.W. Twichell J.C. Lyszczarz T.M. J. Vac. Sci. Technol. B 14 1996 2060
3. Zhu W. Kochanski G.P. Jin S. Seibles L. J. Appl. Phys. 78 1995 2707
4. Johnson S.E. Ashfold M.N.R. Knapper M.P. Lade R.J. Rosser K.N. Fox N.A. Wang W.N. Diamond Relat. Mater. 6 1997 569
5. Ronning C. Griesmeier U. Gross M. Hofsäss H.C. Downing R.G. Lamaze G.P. Diamond Relat. Mater. 4 1995 666
6. Fink J. Müller-Heinzerling Th. Pflüger J. Scheere B. Dischler B. Koidl P. Bubenzer A. Sah R.E. Phys. Rev. B 30 1984 4713
7. Silva S.R.P. Amaratunga G.A.J. Barnes J.R. Appl. Phys. Lett. 71 1997 1477
8. Wang Q.H. Corrigan T.D. Dai J.Y. Chang R.P.H. Krauss A.R. Appl. Phys. Lett. 70 1997 3308
9. Küttel O.M. Groening O. Emmenegger C. Schlapbach L. Appl. Phys. Lett. 73 1998 2113
10. Xu X. Brandes G.R. Appl. Phys. Lett. 74 1999 2549
11. Baughman R.H. Zakhidov A.A. de Heer W.A. Science 297 2002 787
12. Ong K.G. Zeng K. Grimes C.A. IEEE Sensors J. 2 2002 82
13. Collins P.G. Bradley K. Ishigami M. Zettl A. Science 287 2000 1801
14. Liu N. Ma Z. Chu X. Hu T. Xue Z. Jiang X. Pang S. J. Vac. Sci. Technol. B 12 1994 1712
15. Hong D. Aslam M. J. Vac. Sci. Technol. B 13 1995 427
16. Field J.E. The Properties of Diamond 1979 Academic Press New York
17. Lade R.J. Munns D.J. Johnson S.E. May P.W. Rosser K.N. Ashfold M.N.R. Diamond Relat. Mater. 7 1998 699
18. Lacerda M.M. Freire F.L.Jr. Mariotto G. Diamond Relat. Mater. 7 1998 412
19. Forest R.D., Burden A.P., Silva S.R.P. 73 (1998) 3784
20. Baek Y.G. Ikuno T. Ryu J.T. Honda S. Katayama M. Oura K. Hirao T. Appl. Surf. Sci. 185 2002 243
21. Jung H.S. Park H.H. Pang S.S. Lee S.Y. Thin Solid Films 355-356 1999 151
22. Hoffmann U. Weber A. Lohken T. Klages C.P. Spaeth C. Richter F. Diamond Relat. Mater. 7 1998 682
23. Teo K.B.K. Chhowalla M. Amaratunga G.A.J. Milne W.I. Pirio G. Legagneux P. Pribat D. Hasko D.G. Appl. Phys. Lett. 80 2002 2011
24. Zhang J. Feng T. Yu W. Liu X. Wang X. Li Q. Diamond Relat. Mater. 13 2004 54
25. Bae J.C. Yoon Y.J. Lee S.-J. Baik H.K. Phys. B: Conden. Matter 323 2002 168
26. Dillon R.O. Woollam J.A. Katkanant V. Phys. Rev. B 29 1984 3482
27. Tong W.M. Pan L.S. Felter T.E. Anders S. Cossy-Favre A. Stammler T. Mater. Res. Soc. Symp. Proc. 509 1998 155