Structure and mechanical performance of nitrogen doped diamond-like carbon films

Journal of Materials Science and Technology

Volumn 23, Issue 4, 2007, Pages 491-494

  Zhang, Huayu ^a   Liu, Liangxue ^a   Wang, Yulei ^a   Ma, Hongtao ^b   Liu, Fanxin ^b  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b SAE Technologies Development Co Ltd   (China)

Author keywords

ECR CVD; Mechanical performance; Nitrogen doped diamond like carbon films; Structure

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND LIKE CARBON FILMS; DOPING (ADDITIVES); NITROGEN; POLYSILICON;

ELECTRON CYCLOTRON RESONANCE CHEMICAL VAPOR DEPOSITION (ECR-CVD); NITROGEN CONTENT; NITROGEN FLOW; POLYCRYSTALLINE SILICON CHIPS; YOUNG MODULUS;

HARDNESS;

EID: 34547981335     PISSN: 10050302     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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