Effect of substrate bias on microstructure and properties of tetrahedral amorphous carbon films

Journal of Materials Science and Technology

Volumn 19, Issue SUPPL., 2003, Pages 109-111

  Zhu, Jiaqi ^a   Han, Jiecai ^a   Meng, Songhe ^a   Li, Qiang ^a   Tan, Manlin ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Filtered cathodic vacuum arc; Substrate bias; Tetrahedral amorphous carbon

Indexed keywords

CARBON; DEPOSITION; MICROSTRUCTURE; SUBSTRATES;

FILTERED CATHODIC VACUUM ARC TECHNOLOGY; NEGATIVE BIAS; PROPERTIES; TETRAHEDRAL AMORPHOUS CARBON;

AMORPHOUS FILMS;

EID: 3242787298     PISSN: 10050302     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

1. J.Robertson: Mater. Sci. Eng., 2002, 37, 131.
2. P.J.Fallon, V.S.Veerasamy, C.A.Davis, J.Robertson, G.A.J.Amaratunga, W.I.Milne and J.Koskinen: Phys. Rev. B, 1993, 48, 4777.
3. X.Shi, B.K.Tay, H.S.Tan, Z.Li, Y.Q.Tu, S.R.P.Silva and W.I.Milne: J. Appl. Phys., 1996, 79, 7234.
4. Y.Lifshitz: Diamond Relat. Mater., 1996, 5, 388.
5. D.R.McKenzie, D.Muller and B.A.Pailthorpe: Phys. Rev. Lett., 1991, 67, 773.
6. A.C.Ferrari: Diamond Relat. Mater., 2002, 11, 1053.
7. M.A.Tamor and W.C.Vassell: J. Appl. Phys., 1994, 76, 3823
8. Jijun ZHU, Zuhong LU, Xin ZHONG, Dunwen ZUO and Min WANG: Journal of Applied Sciences, 2000, 18, 47. (in Chinese)
9. S.Prawer, K.W.Nugent, Y.Lifishitz, G.D.Lempert, E.Grossman, J.Kulik, I.Avigal and R.Kalish: Diamond Relat. Mater., 1996, 5, 433.
10. D.H.Chen, A.X.Wei, S.P.Wong, S.Q.Peng, J.B.Xu and I.H.Wilson: J. Non-Cryst. Solids, 1999, 254, 161.