Composition and microstructure of magnetron sputtering deposited Ti-containing amorphous carbon films

Journal of Materials Science and Technology

Volumn 23, Issue 4, 2007, Pages 571-573

  Du, Jun ^a   Zhang, Ping ^a  

^a NATIONAL KEY LABORATORY FOR REMANUFACTURING   (China)

Author keywords

Carbon bond structure; Carbon film; Magnetron sputtering deposition

Indexed keywords

AMORPHOUS CARBON; CARBON FILMS; DEPOSITION; MAGNETRON SPUTTERING; NANOCRYSTALLINE MATERIALS; TITANIUM CARBIDE;

CARBON BOND STRUCTURE; COMPOSITION; TITANIUM CONTAINING CARBON FILMS;

MICROSTRUCTURE;

EID: 34547986064     PISSN: 10050302     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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