Correlation between substrate bias, growth process and structural properties of phosphorus incorporated tetrahedral amorphous carbon films

Applied Surface Science

Volumn 253, Issue 23, 2007, Pages 9124-9129

  Liu, Aiping ^a   Zhu, Jiaqi ^a   Han, Jiecai ^a   Wu, Huaping ^a   Jia, Zechun ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Filtered cathodic vacuum arc; Microstructure; Optical gap; Phosphorus incorporated tetrahedral amorphous carbon; Residual stress; Substrate bias

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPRESSIVE STRESS; FILM GROWTH; MICROSTRUCTURE; PHOSPHORUS; X RAY PHOTOELECTRON SPECTROSCOPY;

FILTERED CATHODIC VACUUM ARC; OPTICAL GAP; SUBSTRATE BIAS;

CARBON FILMS;

EID: 34548269206     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.05.040     Document Type: Article

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