Fabrication and characterization of thermally driven fast turn-on microvalve with adjustable backpressure design

Microelectronic Engineering

Volumn 88, Issue 2, 2011, Pages 187-194

  Feng, Guo Hua ^a   Chou, Yu Chin ^a  

^a NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

Author keywords

Microheater; Micromachining; Microvalve; Paraffin wax; Thermal actuation

Indexed keywords

3-DIMENSIONAL; ADJUSTABILITY; BACK PRESSURES; FAST SWITCHES; HEATING POWER; KEY COMPONENT; MICRO VALVES; MICROHEATER; MICROMACHINED; RAPID-HEATING; THERMAL ACTUATION; THERMALLY DRIVEN; THROUGH HOLE; VOLUME EXPANSION;

COMPOSITE MICROMECHANICS; DESIGN; HEATING; HEATING EQUIPMENT; MICROMACHINING; PARAFFINS; VALVES (MECHANICAL);

PARAFFIN WAXES;

EID: 78650016356     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.10.011     Document Type: Article

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