A latchable phase-change microvalve with integrated heaters

Journal of Microelectromechanical Systems

Volumn 18, Issue 4, 2009, Pages 860-867

  Yang, Bozhi ^a   Lin, Qiao ^b  

^a Infinia Corporation   (United States)

^b Columbia University ^*  (United States)

Author keywords

Actuators; Fluid flow control; Paraffin wax; Phase change; Valve

Indexed keywords

CHAMBER DESIGN; CROSS CONTAMINATION; FLUID FLOW; FLUID FLOW CONTROL; INLET PRESSURES; INTEGRATED HEATER; LAB-ON-A-CHIP SYSTEMS; LOCALIZED MELTING; MICRO VALVES; MICRO-HEATERS; MICROHEATER; MINIMAL ENERGY; MULTILAYER SOFT LITHOGRAPHY; PHASE CHANGE; PHASE CHANGES; PNEUMATIC PRESSURE; SOLID LIQUID PHASE CHANGE; THERMAL MASS; TIME RESPONSE; VALVE;

ACTUATORS; FLOW CONTROL; FLOW OF FLUIDS; HEATING EQUIPMENT; MELTING; MELTING POINT; PARAFFIN WAXES; PARAFFINS; SILICONES; SWITCHING;

VALVES (MECHANICAL);

EID: 68849094373     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2024806     Document Type: Article

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