A polymeric paraffin micropump with active valves for high-pressure microfluidics

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 201-204

  Boden R ^a   Lehto, M ^a   Simu, U ^a   Thornell, G ^a   Hjort, K ^a   Schweitz, J A ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

Active valves; High pressure; Micropump; Paraffin; UV curing epoxy

Indexed keywords

ELECTRIC POTENTIAL; EPOXY RESINS; LEAKAGE (FLUID); MICROELECTROMECHANICAL DEVICES; PARAFFINS; POLYIMIDES;

ACTIVE VALVES; HIGH PRESSURE; MICROPUMPS; UV-CURING EPOXY;

FLUIDIC DEVICES;

EID: 27544440977     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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3. L. Klintberg, M. Svedberg, F. Nikolajeff, and G. Thornell, "Fabrication of a paraffin actuator using hot embossing of polycarbonate", Sensors and Actuators A, 103, 307-316 (2003).
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5. M. Lehto, R. Bodén, U. Simu, K. Hjort, and J.-A. Schweitz, "Printed Circuit Board paraffin Actuators for Disposable Microfluidic Systems", Proceedings of Actuator 2004, 220-223 (2004).