Thermal analysis for bulk-micromachined electrothermal hydraulic microactuators using a phase change material

Sensors and Actuators, A: Physical

Volumn 135, Issue 2, 2007, Pages 731-739

  Lee, Jun Su ^a   Lucyszyn, Stepan ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Melting process; Microactuator; Neumann's solution; Paraffin wax; Stefan's problem

Indexed keywords

FINITE ELEMENT METHOD; MELTING; MELTING POINT; MICROMACHINING; PARAFFIN WAXES; PHASE CHANGE MATERIALS; THERMOANALYSIS;

BRAILLE CELL; ELECTROTHERMAL HYDRAULIC MICROACTUATORS; MICROPIPETTE; STEFAN'S PROBLEM;

MICROACTUATORS;

EID: 34047116508     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.07.033     Document Type: Article

References (17)

1. Tibbitts S.F. High-output paraffin linear motors: utilization in adaptive systems. SPIE, Proceedings, vol. 1543 (1991) 388-399
2. Dowen D.E. Design and implementation of a paraffin based micropositioning actuator. SPIE, vol. 3132 (1997) 127-134
3. Kabei N., Kosuda M., Kagamibuchi H., Tashiro R., Mizuno H., Ueda Y., and Tsuchiya K. A thermal-expansion-type microactuator with paraffin as the expansive material. JSME Int. J., Ser. C 40 4 (1997) 736-742
4. Carlen E.T., and Mastrangelo C.H. Electrothermally activated paraffin microactuators. J. MEMS 11 June (3) (2002) 165-173
5. Klintberg L., Karlsson M., Stenmark L., Schweitz J.-A., and Thornell G. A large stroke, high force paraffin phased transition actuator. Sens. Actuators A 96 (2002) 189-195
6. Klintberg L., Svedberg M., Nikolajeff F., and Thornell G. Fabrication of a paraffin actuator using hot embossing of polycarbonate. Sens. Actuators A 103 (2003) 307-316
7. Klintberg L., Karlsson M., Stenmark L., and Thornell G. A thermally activated paraffin-based actuator for gas-flow control in a satellite electrical propulsion system. Sens. Actuators A 105 (2003) 237-246
8. Selvaganapathy P., Carlen E.T., and Mastrangelo C.H. Electrothermally actuated inline microfluidic valve. Sens. Actuators A 3647 (2003) 1-8
9. Carlen E.T., and Mastrangelo C.H. Surface micromachined paraffin-actuated microvalve. J. MEMS 11 October (5) (2002) 408-420
10. Lehto M., Boden R., Simu U., Hjort K., and Schweitz J.-A. Printed circuit board paraffin actuators for disposable microfluidic systems. Actuators 2004, June 14-16 (2004) 220-223
11. Boden R., Lehto M., Simu U., Thrnell G., Hjort K., and Schweitz J.-A. A polymeric paraffin micropump with active valves for high-pressure microfluidics. Transducers'05 (June 5-6, 2005), Seoul, Korea
12. H. Yousef, M. Lehto, T. Jaderblom, I. Enculescu, K. Hjort, A device integrating paraffin microactuator, fluidic compartment and microneedle array for fluidic injection or sampling, 9th Int. Conf. Miniaturized Syst. Chem. Life Sci. (μTAS), Boston, MA, USA, October 9-13, 2005.
13. Lee J.S., and Lucyszyn S. A micromachined refreshable Braille cell. IEEE/ASME J. Microelectromech. Syst. 13 4 (2005) 673-682
14. Lee J.S., and Lucyszyn S. Bulk-micromachined hydraulic microactuator. ICMAT-2005, Proceedings of Symposium F (2005) 115-118
15. J.S. Lee, S. Lucyszyn, Design and pressure analysis for bulk-micromachined electrothermal hydraulic microactuator using PCM, Sens. Actuators A: Phys., accepted for publication (Special issue).
16. Alexiades V., and Solomon A.D. Mathematical Modelling of Melting and Freezing Processes (1993), Hemisphere Publishing Corporation, USA
17. Broussenau P., and Lacroix M. Numeriacl simulation of a multi-layer latent heat thermal energy storage system. Int. J. Energy Res. 22 (1998) 1-15