Piezoelectrically actuated dome-shaped diaphragm micropump

Journal of Microelectromechanical Systems

Volumn 14, Issue 2, 2005, Pages 192-199

  Feng, Guo Hua ^a   Kim, Eun Sok ^a  

^a University of Southern California ^*  (United States)

Author keywords

Ball; Dome shaped diaphragm transducer (DSDT); Micropump; Parylene valves; Piezoelectricity; Three dimensional (3 D) structure; Wax; ZnO

Indexed keywords

DIAPHRAGMS; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; PUMPS; SILICON; SPUTTER DEPOSITION; TRANSDUCERS; VALVES (MECHANICAL); WAXES; ZINC OXIDE;

BALL; DOME SHAPED DIAPHRAGM TRANSDUCER (DSDT); MICROPUMP; PARYLENE VALVES; PIEZOELECTRIC ACTUATION;

MICROELECTROMECHANICAL DEVICES;

EID: 18844370104     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839331     Document Type: Article

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