Bioinspired 3-D tactile sensor for minimally invasive surgery

Journal of Microelectromechanical Systems

Volumn 19, Issue 6, 2010, Pages 1400-1408

  Hu, Yating ^a   Katragadda, Rakesh B ^a   Tu, Hongen ^a   Zheng, Qinglong ^a   Li, Yuefa ^a   Xu, Yong ^a  

^a Wayne State University   (United States)

Author keywords

Microelectromechanical devices; piezoresistive devices; surgery; tactile sensors

Indexed keywords

BIO-INSPIRED; CYLINDRICAL CAVITIES; FABRICATION PROCESS; HAIR CELLS; HIGH ASPECT RATIO; MINIMALLY INVASIVE SURGERY; MULTIPLE SENSORS; NORMAL DIRECTION; NORMAL FORCES; PIEZO-RESISTORS; PIEZORESISTIVE DEVICES; PIEZORESISTOR; RESISTANCE CHANGE; SCRATCHING TEST; SHEAR FORCE; TACTILE SENSORS;

ASPECT RATIO; MICROELECTROMECHANICAL DEVICES; POLYIMIDES; REACTIVE ION ETCHING; SURGERY; THREE DIMENSIONAL;

SENSORS;

EID: 78649646270     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2076778     Document Type: Article

References (31)

1. T. N. Robinson and G. V. Stiegmann, "Minimally invasive surgery," Endoscopy, vol. 36, no. 1, pp. 48-51, Jan. 2004.
2. D. M. Cosgrove, J. F. Sabik, and J. L. Navia, "Minimally invasive valve operations," Ann. Thorac. Surg., vol. 65, no. 6, pp. 1535-1538, Jun. 1998.
3. P. E. Muller, C. Pellengahr, M. Witt, J. Kircher, H. J. Refior, and V. Jansson, "Influence of minimally invasive surgery on implant positioning and the functional outcome for medial unicompartmental knee arthroplasty," J. Arthroplasty, vol. 19, no. 3, pp. 296-301, Apr. 2004.
4. J. G. Webster, Tactile Sensors for Robotics and Medicine. Hoboken, NJ: Wiley, 1988.
5. R. D. Howe, "Tactile sensing and control of robotic manipulation," Adv. Robot., vol. 8, no. 3, pp. 245-261, 1994.
6. M. H. Lee and H. R. Nicholls, "Review Article Tactile sensing for mechatronics-A state of the art survey," Mechatronics, vol. 9, no. 1, pp. 1-31, Feb. 1999.
7. M. H. Lee, "Tactile sensing: New directions, new challenges," Int. J. Robot. Res., vol. 19, no. 7, pp. 636-643, Jul. 2000.
8. M. E. H. Eltaib and J. R. Hewit, "Tactile sensing technology for minimal access surgery-A review," Mechatronics, vol. 13, no. 10, pp. 1163-1177, Dec. 2003.
9. A. M. Okamura, "Haptic feedback in robot-assisted minimally invasive surgery," Curr. Opin. Urol., vol. 19, no. 1, pp. 102-107, Jan. 2009.
10. P. Puangmali, K. Althoefer, L. D. Seneviratne, D. Murphy, and P. Dasgupta, "State-of-the-art in force and tactile sensing for minimally invasive surgery," IEEE Sensors J., vol. 8, no. 4, pp. 371-381, Apr. 2008.
11. H. R. Nicholls and M. H. Lee, "A survey of robot tactile sensing technology," Int. J. Robot. Res., vol. 8, no. 3, pp. 3-30, Jun. 1989.
12. R. D. Howe and M. R. Cutkosky, "Touch sensing for robotic manipulation and recognition," in The Robotics Review 2. Cambridge, MA: MIT Press, 1992, pp. 55-112.
13. R. A. Beasley and R. D. Howe, "Tactile tracking of arteries in robotic surgery," in Proc. IEEE Int. Conf. Robot. Autom., Washington, DC, 2002, pp. 3801-3806.
14. B. L. Gray and R. S. Fearing, "A surface micromachined microtactile sensor array," in Proc. IEEE Int. Conf. Robot. Autom., Minneapolis, MN, 1996, pp. 1-6.
15. T. Salo, T. Vancura, O. Brand, and H. Baltes, "CMOS-based sealed membranes for medical tactile sensor arrays," in Proc. IEEE 16th Annu. Int. Conf. Micro Electro Mech. Syst., Kyoto, Japan, 2003, pp. 590-593.
16. B. J. Kane, M. R. Cutkosky, and G. T. A. Kovacs, "CMOS-compatible traction stress sensor for use in high-resolution tactile imaging," Sens. Actuators A, Phys., vol. 54, no. 1-3, pp. 511-516, Jun. 1996.
17. Z. Chu, P. M. Sarro, and S. Middelhoek, "Silicon three-axial tactile sensor," Sens. Actuators A, Phys., vol. 54, no. 1-3, pp. 505-510, Jun. 1996.
18. T. Mei, W. J. Li, Y. Ge, Y. Chen, L. Ni, and M. H. Chan, "An integrated MEMS three-dimensional tactile sensor with large force range," Sens. Actuators A, Phys., vol. 80, no. 2, pp. 155-162, Mar. 2000.
19. P. Dallos and B. N. Evans, "High-frequency motility of outer hair-cells and the cochlear amplifier," Science, vol. 267, no. 5206, pp. 2006-2009, Mar. 1995.
20. F. G. Barth, J. A. C. Humphrey, and T. W. Secomb, Sensors and Sensing in Biology and Engineering. New York: Springer-Verlag, 2003.
21. R. B. Katragadda, Z. Wang, and Y. Xu, "A high-sensitivity 3-D tactile sensor for minimally invasive surgery," in Proc. IEEE Sensors Conf., Atlanta, GA, 2007, pp. 808-810.
22. H. Hu, C. Liu, and N. Chen, "A robust tactile shear stress sensor derived from a bio-inspired artificial haircell sensor," in Proc. IEEE Sensors Conf., Lecce, Italy, 2008, pp. 1517-1519.
23. J. C. Doll, N. Harjee, N. Klejwa, R. Kwon, S. M. Coulthard, B. Petzold, M. B. Goodman, and B. L. Pruitt, "SU-8 force sensing pillar arrays for biological measurements," Lab Chip, vol. 9, no. 10, pp. 1449-1454, May 2009.
24. J. Chen, Z. F. Fan, J. Zou, J. Engel, and C. Liu, "Two-dimensional micro-machined flow sensor array for fluid mechanics studies," J. Aerosp. Eng., vol. 16, no. 2, pp. 85-97, Apr. 2003.
25. G. J. M. Krijnen, M. Dijkstra, J. J. van Baar, S. S. Shankar, W. J. Kuipers, R. J. H. de Boer, D. Altpeter, T. S. J. Lammerink, and R. Wiegerink, "MEMS based hair flow-sensors as model systems for acoustic perception studies," Nanotechnology, vol. 17, no. 4, pp. S84-S89, Feb. 2006.
26. J. A. Harley and T. W. Kenny, "1/f noise considerations for the design and process optimization of piezoresistive cantilevers," J. Microelectromech. Syst., vol. 9, no. 2, pp. 226-235, Jun. 2000.
27. T. Stieglitz, "Development of a micromachined epiretinal vision prosthesis," J. Neural Eng., vol. 6, no. 6, pp. 139-158, Dec. 2009.
28. E. Obermeier and P. Kopystynski, "Polysilicon as a material for microsen-sor applications," Sens. Actuators A, Phys., vol. 30, no. 1/2, pp. 149-155, Jan. 1992.
29. J. M. Engel, J. Chen, C. Liu, and D. Bullen, "Polyurethane rubber all-polymer artificial hair cell sensor," J. Microelectromech. Syst., vol. 15, no. 4, pp. 729-736, Aug. 2006.
30. Y. Xu, Y. C. Tai, A. Huang, and C. M. Ho, "IC-integrated flexible shear-stress sensor skin," J. Microelectromech. Syst., vol. 12, no. 5, pp. 740-747, Oct. 2003.
31. Y. Xu, F. Jiang, S. Newbern, A. Huang, C. M. Ho, and Y. C. Tai, "Flexible shear-stress sensor skin and its application to unmanned aerial vehicles," Sens. Actuators A, Phys., vol. 105, no. 3, pp. 321-329, Aug. 2003.