MEMS based hair flow-sensors as model systems for acoustic perception studies

Nanotechnology

Volumn 17, Issue 4, 2006, Pages

  Krijnen, Gijs J M ^a   Dijkstra, Marcel ^a   Van Baar, John J ^a   Shankar, Siripurapu S ^a   Kuipers, Winfred J ^a   De Boer, Rik J H ^a   Altpeter, Dominique ^a   Lammerink, Theo S J ^a   Wiegerink, Remco ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; DEGREES OF FREEDOM (MECHANICS); ELECTROCHEMICAL ELECTRODES; ELECTROSTATICS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SUBSTRATES;

HAIR FLOW-SENSORS; SENSORY ACOUSTICS; STOCHASTIC RESONANCE; SUSPENDED MEMBRANES;

SENSORS;

EID: 31944435093     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/17/4/013     Document Type: Article

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