A robust tactile shear stress sensor derived from a bio-inspired artificial haircell sensor

Proceedings of IEEE Sensors

Volumn , Issue , 2008, Pages 1517-1519

  Hu, Huan ^a   Liu, Chang ^a   Chen, Nannan ^b  

^a Northwestern University   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SHEAR FLOW; STRESS MEASUREMENT;

ARTIFICIAL HAIR CELLS; DIRECTIONAL RESPONSE; FLOW SENSING; FLOW-SENSORS; POTENTIAL CAPABILITY; SHEAR-STRESS SENSORS; SILICON DEVICES;

SHEAR STRESS;

EID: 67649980475     PISSN: 19300395     EISSN: 21689229     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2008.4716735     Document Type: Conference Paper

References (3)

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2. K. Noda et al, " A shear stress sensor for tacitle sensing with the piezoresistive cantilever standing in elastic material", Sensors and Actuators A, V127, 2006. (Pubitemid 44733150)
3. N. Chen et all, "Design and Characterization of Artificial Haircell Sensor for Flow Sensing With Ultrahigh Velocity and Angular Sensitivity", Journal of Microelectromechanical System, V16(5), 2007. (Pubitemid 47532910)