Research on the atomic force microscopy-based fabrication of nanochannels on silicon oxide surfaces

Chinese Science Bulletin

Volumn 55, Issue 30, 2010, Pages 3466-3471

  Wang, ZhiQian ^a,b   Jiao, NianDong ^a   Tung, Steve ^c   Dong, ZaiLi ^a  

^a SHENYANG INSTITUTE OF AUTOMATION   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c University of Arkansas   (United States)

Author keywords

atomic force microscopy; nanochannels; nanoelectromechanical systems; nanolithography; nanotribology

Indexed keywords

EID: 78349231975     PISSN: 10016538     EISSN: 18619541     Source Type: Journal    
DOI: 10.1007/s11434-010-4077-4     Document Type: Article

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