An approach to the coupling effect between torsion and bending for electrostatic torsional micromirrors

Sensors and Actuators, A: Physical

Volumn 115, Issue 1, 2004, Pages 159-167

  Huang, Jian Ming ^a,b   Liu, Ai Qun ^a   Deng, Zhongliang ^b   Zhang, Q X ^c   Ahn, Jaeshin ^a   Asundi, Anand ^d  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

^c INSTITUTE OF MICROELECTRONICS   (Singapore)

^d NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

MOEMS; Optical MEMS; Pull in effect; Torsional micromirror

Indexed keywords

COUPLING EFFECTS; PULL-IN EFFECT; TORSION BEAMS; TORSIONAL MICROMIRRORS;

ACTUATORS; BENDING (DEFORMATION); BOUNDARY CONDITIONS; CAPACITORS; DATA PROCESSING; ELECTRODES; MICROMACHINING; POLYSILICON; PROJECTION SYSTEMS; TORSIONAL STRESS;

ELECTROSTATIC DEVICES;

EID: 4243103784     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.04.032     Document Type: Article

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