A comparative study of analytical squeeze film damping models in rigid rectangular perforated MEMS structures with experimental results

Microfluidics and Nanofluidics

Volumn 4, Issue 3, 2008, Pages 205-218

  Pandey, Ashok Kumar ^a   Pratap, Rudra ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

Analytical model; Experimental result; Perforations; Reynolds equation; Squeeze film damping

Indexed keywords

DAMPING; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NAVIER STOKES EQUATIONS; REYNOLDS EQUATION;

DAMPING CONSTANT; SQUEEZED FILM;

FLUID DYNAMICS;

EID: 38649093920     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-007-0165-4     Document Type: Article

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